Patent Assignment Details
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| Reel/Frame: | 034895/0449 | |
| Pages: | 5 |
| | Recorded: | 02/05/2015 | | |
| Attorney Dkt #: | 1022.0052C |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/09/2017
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Application #:
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14614625
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Filing Dt:
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02/05/2015
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Publication #:
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Pub Dt:
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05/28/2015
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Title:
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Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
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Assignee
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| 14-1 SOTOKANDA |
| 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 1018980 |
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Correspondence name and address
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JANET DORGAN
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9801 WASHINGTONIAN BLVD.
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SUITE 750
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GAITHERSBURG, MD 20878
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