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Patent #:
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Issue Dt:
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06/16/2015
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Application #:
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11846890
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Filing Dt:
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08/29/2007
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Publication #:
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Pub Dt:
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03/06/2008
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/12/2015
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Application #:
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11871595
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Filing Dt:
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10/12/2007
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Publication #:
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Pub Dt:
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10/16/2008
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Title:
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NOZZLE AND A SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
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Patent #:
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Issue Dt:
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06/09/2015
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Application #:
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12029608
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Filing Dt:
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02/12/2008
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Publication #:
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Pub Dt:
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08/21/2008
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12209598
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Filing Dt:
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09/12/2008
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Publication #:
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Pub Dt:
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04/02/2009
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Title:
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SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
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Patent #:
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Issue Dt:
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08/04/2015
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Application #:
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12362945
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Filing Dt:
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01/30/2009
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Publication #:
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Pub Dt:
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08/06/2009
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Title:
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SUBSTRATE TREATMENT APPARATUS, AND SUBSTRATE TREATMENT METHOD
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12363066
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Filing Dt:
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01/30/2009
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Publication #:
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Pub Dt:
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08/06/2009
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Title:
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SUBSTRATE TREATMENT APPARATUS, AND SUBSTRATE SUPPORT TO BE USED FOR THE APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12508091
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Filing Dt:
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07/23/2009
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Publication #:
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Pub Dt:
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03/04/2010
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12879246
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Filing Dt:
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09/10/2010
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Publication #:
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Pub Dt:
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12/30/2010
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR HEAT-TREATING SUBSTRATE
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Patent #:
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Issue Dt:
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10/20/2015
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Application #:
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12880636
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Filing Dt:
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09/13/2010
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Publication #:
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Pub Dt:
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03/31/2011
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Title:
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SUBSTRATE TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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11/24/2015
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Application #:
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13053946
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Filing Dt:
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03/22/2011
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Publication #:
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Pub Dt:
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07/14/2011
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Title:
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DEVELOPING APPARATUS AND DEVELOPING METHOD
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13070786
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Filing Dt:
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03/24/2011
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Publication #:
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Pub Dt:
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03/29/2012
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Title:
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APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
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Patent #:
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Issue Dt:
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05/26/2015
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Application #:
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13086762
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Filing Dt:
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04/14/2011
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Publication #:
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Pub Dt:
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04/05/2012
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Title:
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DRAWING DEVICE AND DRAWING METHOD
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Patent #:
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Issue Dt:
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04/28/2015
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Application #:
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13151844
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Filing Dt:
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06/02/2011
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Publication #:
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Pub Dt:
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12/08/2011
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Title:
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BATTERY, VEHICLE, ELECTRONIC DEVICE AND BATTERY MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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07/14/2015
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Application #:
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13177696
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Filing Dt:
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07/07/2011
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Publication #:
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Pub Dt:
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10/27/2011
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Title:
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HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY EMITTING FLASHING LIGHT
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Patent #:
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Issue Dt:
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05/05/2015
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Application #:
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13177705
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Filing Dt:
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07/07/2011
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Publication #:
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Pub Dt:
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03/29/2012
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Title:
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HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY IRRADIATING SUBSTRATE WITH FLASHES OF LIGHT
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13181928
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Filing Dt:
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07/13/2011
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Publication #:
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Pub Dt:
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01/19/2012
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Title:
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BATTERY MANUFACTURING METHOD, BATTERY, VEHICLE AND ELECTRONIC DEVICE
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Patent #:
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Issue Dt:
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04/11/2017
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Application #:
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13237408
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Filing Dt:
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09/20/2011
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Publication #:
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Pub Dt:
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03/29/2012
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Title:
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SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
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Patent #:
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Issue Dt:
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07/19/2016
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Application #:
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13245375
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Filing Dt:
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09/26/2011
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Publication #:
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Pub Dt:
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04/19/2012
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13246258
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Filing Dt:
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09/27/2011
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Publication #:
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Pub Dt:
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03/29/2012
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Title:
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SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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12/15/2015
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Application #:
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13309070
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Filing Dt:
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12/01/2011
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Publication #:
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Pub Dt:
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07/12/2012
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/05/2015
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Application #:
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13365731
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Filing Dt:
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02/03/2012
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Publication #:
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Pub Dt:
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06/07/2012
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR SUCCESSIVELY PROCESSING A PLURALITY OF SUBSTRATES
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Patent #:
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Issue Dt:
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02/14/2017
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Application #:
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13368986
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Filing Dt:
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02/08/2012
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Publication #:
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Pub Dt:
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09/20/2012
| | | | |
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Title:
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SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
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06/16/2015
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Application #:
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13415438
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Filing Dt:
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03/08/2012
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Publication #:
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Pub Dt:
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09/20/2012
| | | | |
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Title:
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SUBSTRATE TREATMENT APPARATUS
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Patent #:
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|
Issue Dt:
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05/17/2016
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Application #:
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13417498
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Filing Dt:
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03/12/2012
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Publication #:
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Pub Dt:
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09/27/2012
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Title:
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HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY IRRADIATING SUBSTRATE WITH LIGHT
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Patent #:
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Issue Dt:
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06/07/2016
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Application #:
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13425918
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Filing Dt:
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03/21/2012
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Publication #:
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Pub Dt:
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07/12/2012
| | | | |
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Title:
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SUBSTRATE TREATMENT METHOD
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Patent #:
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Issue Dt:
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01/05/2016
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Application #:
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13427370
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Filing Dt:
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03/22/2012
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Publication #:
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Pub Dt:
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09/27/2012
| | | | |
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Title:
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SUBSTRATE TREATMENT METHOD
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Patent #:
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Issue Dt:
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05/31/2016
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Application #:
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13427452
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Filing Dt:
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03/22/2012
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Publication #:
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Pub Dt:
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10/04/2012
| | | | |
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Title:
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SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
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Patent #:
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Issue Dt:
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11/17/2015
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Application #:
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13450654
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Filing Dt:
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04/19/2012
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Publication #:
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Pub Dt:
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11/01/2012
| | | | |
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Title:
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METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/20/2018
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Application #:
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13468381
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Filing Dt:
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05/10/2012
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Publication #:
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Pub Dt:
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11/15/2012
| | | | |
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Title:
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HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY IRRADIATING SUBSTRATE WITH LIGHT
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13481392
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Filing Dt:
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05/25/2012
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Publication #:
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Pub Dt:
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12/06/2012
| | | | |
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Title:
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IMAGE ACQUISITION APPARATUS, PATTERN INSPECTION APPARATUS, AND IMAGE ACQUISITION METHOD
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13523186
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Filing Dt:
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06/14/2012
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Publication #:
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Pub Dt:
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01/17/2013
| | | | |
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13527803
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Filing Dt:
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06/20/2012
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Publication #:
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Pub Dt:
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02/28/2013
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND NOZZLE
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|
Patent #:
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NONE
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Issue Dt:
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|
Application #:
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13530878
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Filing Dt:
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06/22/2012
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Publication #:
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|
Pub Dt:
|
03/21/2013
| | | | |
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Title:
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BATTERY ELECTRODE MANUFACTURING METHOD AND BATTERY MANUFACTURING METHOD
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Patent #:
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|
Issue Dt:
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06/28/2016
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Application #:
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13539626
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Filing Dt:
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07/02/2012
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|
Publication #:
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Pub Dt:
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01/24/2013
| | | | |
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Title:
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USING PROCESSING SOLUTION
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|
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13544207
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Filing Dt:
|
07/09/2012
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Publication #:
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|
Pub Dt:
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01/17/2013
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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|
|
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13556674
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Filing Dt:
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07/24/2012
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Publication #:
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|
Pub Dt:
|
03/07/2013
| | | | |
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Title:
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APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
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Patent #:
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|
Issue Dt:
|
08/04/2015
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Application #:
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13557417
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Filing Dt:
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07/25/2012
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Publication #:
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Pub Dt:
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03/28/2013
| | | | |
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Title:
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IMAGING APPARATUS, DETECTING APPARATUS, AND IMAGING METHOD
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Patent #:
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NONE
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Issue Dt:
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|
Application #:
|
13584279
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Filing Dt:
|
08/13/2012
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|
Publication #:
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|
Pub Dt:
|
02/28/2013
| | | | |
|
Title:
|
SUBSTRATE TREATING APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
|
03/22/2016
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Application #:
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13590215
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Filing Dt:
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08/21/2012
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Publication #:
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Pub Dt:
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02/28/2013
| | | | |
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Title:
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SUBSTRATE PROCESSING METHOD
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Patent #:
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|
Issue Dt:
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09/22/2015
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Application #:
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13590717
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Filing Dt:
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08/21/2012
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Publication #:
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Pub Dt:
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03/14/2013
| | | | |
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Title:
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LITHIUM ION SECONDARY BATTERY AND PREPARATION PROCESS OF SAME
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Patent #:
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Issue Dt:
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07/05/2016
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Application #:
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13596848
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Filing Dt:
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08/28/2012
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Publication #:
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Pub Dt:
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06/20/2013
| | | | |
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Title:
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SUBSTRATE HOLDING AND ROTATING DEVICE, SUBSTRATE TREATMENT APPARATUS INCLUDING THE DEVICE, AND SUBSTRATE TREATMENT METHOD
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Patent #:
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Issue Dt:
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11/03/2015
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Application #:
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13596984
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Filing Dt:
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08/28/2012
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Publication #:
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Pub Dt:
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03/28/2013
| | | | |
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Title:
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SUBSTRATE TREATING SYSTEM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13599432
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Filing Dt:
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08/30/2012
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Publication #:
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Pub Dt:
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03/07/2013
| | | | |
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Title:
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DRAWING APPARATUS AND DRAWING METHOD
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Patent #:
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|
Issue Dt:
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05/03/2016
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Application #:
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13599534
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Filing Dt:
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08/30/2012
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Publication #:
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Pub Dt:
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05/30/2013
| | | | |
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Title:
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ALIGNMENT METHOD, TRANSFER METHOD AND TRANSFER APPARATUS
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Patent #:
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NONE
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Issue Dt:
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|
Application #:
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13608414
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Filing Dt:
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09/10/2012
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Publication #:
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Pub Dt:
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03/21/2013
| | | | |
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Title:
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SCHEDULING METHOD AND RECORDING MEDIUM HAVING SCHEDULING PROGRAM RECORDED THEREON FOR SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
|
09/22/2015
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Application #:
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13628650
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Filing Dt:
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09/27/2012
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|
Publication #:
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Pub Dt:
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04/04/2013
| | | | |
|
Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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|
Issue Dt:
|
10/20/2015
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Application #:
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13628772
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Filing Dt:
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09/27/2012
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|
Publication #:
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Pub Dt:
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04/04/2013
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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|
Issue Dt:
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08/18/2015
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Application #:
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13630833
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Filing Dt:
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09/28/2012
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|
Publication #:
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|
Pub Dt:
|
03/28/2013
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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03/14/2017
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Application #:
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13713606
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Filing Dt:
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12/13/2012
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Publication #:
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Pub Dt:
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10/03/2013
| | | | |
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13721285
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Filing Dt:
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12/20/2012
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Publication #:
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Pub Dt:
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07/04/2013
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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11/24/2015
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Application #:
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13733206
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Filing Dt:
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01/03/2013
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Publication #:
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Pub Dt:
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07/18/2013
| | | | |
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Title:
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APPEARANCE INSPECTION APPARATUS AND METHOD
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13744879
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Filing Dt:
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01/18/2013
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Publication #:
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Pub Dt:
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10/03/2013
| | | | |
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Title:
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SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
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09/20/2016
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Application #:
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13752420
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Filing Dt:
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01/29/2013
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|
Publication #:
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Pub Dt:
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08/08/2013
| | | | |
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Title:
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HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY IRRADIATION WITH FLASHES OF LIGHT, AND HEAT TREATMENT METHOD
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Patent #:
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Issue Dt:
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11/10/2015
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Application #:
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13752422
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Filing Dt:
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01/29/2013
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Publication #:
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Pub Dt:
|
09/26/2013
| | | | |
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Title:
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HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
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Patent #:
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Issue Dt:
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05/24/2016
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Application #:
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13755165
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Filing Dt:
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01/31/2013
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Publication #:
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Pub Dt:
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08/15/2013
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Title:
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HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY IRRADIATING SUBSTRATE WITH FLASH OF LIGHT
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NONE
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13777156
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02/26/2013
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Pub Dt:
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09/12/2013
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Title:
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SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
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06/07/2016
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13785673
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03/05/2013
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10/03/2013
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SUBSTRATE TREATING APPARATUS
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NONE
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13787987
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03/07/2013
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Pub Dt:
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12/19/2013
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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03/24/2015
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13790313
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03/08/2013
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Publication #:
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Pub Dt:
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10/03/2013
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Title:
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HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY IRRADIATING SUBSTRATE WITH FLASH OF LIGHT
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05/03/2016
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13792419
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03/11/2013
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Pub Dt:
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10/03/2013
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Title:
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HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY IRRADIATING SUBSTRATE WITH FLASH OF LIGHT
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12/01/2015
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13793079
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03/11/2013
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10/03/2013
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Title:
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IMAGING APPARATUS AND IMAGING METHOD
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06/23/2015
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13808939
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01/08/2013
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05/09/2013
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Title:
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SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE INSPECTION METHOD
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NONE
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13822916
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03/13/2013
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07/11/2013
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Title:
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SUBSTRATE PROCESSING APPARATUS AND POWER SOURCE MANAGEMENT METHOD
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NONE
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13834906
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03/15/2013
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12/19/2013
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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NONE
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13835073
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03/15/2013
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11/21/2013
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Title:
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CHEMICAL LIQUID PREPARATION METHOD OF PREPARING A CHEMICAL LIQUID FOR SUBSTRATE PROCESSING, CHEMICAL LIQUID PREPARATION UNIT PREPARING A CHEMICAL LIQUID FOR SUBSTRATE PROCESSING, AND SUBSTRATE PROCESSING SYSTEM
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06/09/2015
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13839956
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03/15/2013
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07/18/2013
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Title:
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SUBSTRATE PROCESSING APPARATUS
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NONE
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13848941
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03/22/2013
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09/26/2013
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Title:
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SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
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06/09/2015
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13849603
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03/25/2013
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10/03/2013
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Title:
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SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
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NONE
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13887689
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05/06/2013
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02/20/2014
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Title:
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METHOD OF AND APPARATUS FOR MANUFACTURING ELECTRODE FOR LITHIUM-ION SECONDARY BATTERY AND ELECTRODE FOR LITHIUM-ION SECONDARY BATTERY
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11/22/2016
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13895540
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05/16/2013
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11/28/2013
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Title:
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HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD FOR MEASURING PARTICLE CONCENTRATION
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12/08/2015
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13899628
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05/22/2013
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02/20/2014
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Title:
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IMAGING APPARATUS
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05/05/2015
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13914698
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06/11/2013
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12/19/2013
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HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY IRRADIATING SUBSTRATE WITH LIGHT
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02/20/2018
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13928127
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06/26/2013
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10/31/2013
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SUBSTRATE TREATMENT APPARATUS
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NONE
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13932114
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07/01/2013
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03/13/2014
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NONE
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13933851
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07/02/2013
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11/07/2013
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06/19/2018
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13953954
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07/30/2013
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02/20/2014
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SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD FOR CARRYING OUT CHEMICAL TREATMENT FOR SUBSTRATE
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NONE
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13953964
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07/30/2013
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02/20/2014
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SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD FOR CARRYING OUT CHEMICAL TREATMENT FOR SUBSTRATE
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13954188
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07/30/2013
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02/13/2014
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SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
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09/20/2016
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08/02/2013
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02/13/2014
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NONE
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13961923
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08/08/2013
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03/06/2014
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SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
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06/30/2020
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13965285
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08/13/2013
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12/12/2013
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01/31/2017
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08/19/2013
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03/06/2014
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05/03/2016
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09/06/2013
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04/03/2014
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05/02/2017
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10/29/2013
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14068098
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10/31/2013
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08/28/2014
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11/28/2017
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14081013
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11/15/2013
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06/12/2014
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01/19/2016
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11/22/2013
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08/07/2014
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14102918
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12/11/2013
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07/31/2014
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14104178
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12/12/2013
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06/19/2014
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05/19/2015
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12/27/2013
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09/11/2014
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14142507
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12/27/2013
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04/24/2014
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03/28/2017
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12/30/2013
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07/24/2014
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HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY IRRADIATING SUBSTRATE WITH FLASH OF LIGHT
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07/05/2016
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14146174
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01/02/2014
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07/17/2014
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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NONE
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14146835
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01/03/2014
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07/31/2014
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09/06/2016
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14148324
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01/06/2014
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07/03/2014
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03/22/2016
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14150338
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01/08/2014
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07/17/2014
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04/19/2016
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14150910
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01/09/2014
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Pub Dt:
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09/18/2014
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Title:
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SUBSTRATE PROCESSING APPARATUS
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NONE
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14165839
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01/28/2014
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07/31/2014
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11/03/2015
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14169827
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01/31/2014
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08/07/2014
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METHOD OF CALIBRATION
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09/06/2016
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14176262
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02/10/2014
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06/12/2014
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Title:
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HEAT TREATMENT APPARATUS EMITTING FLASH OF LIGHT
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