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Reel/Frame:035070/0221   Pages: 6
Recorded: 03/02/2015
Attorney Dkt #:4030-0493US
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
08/21/2018
Application #:
14635978
Filing Dt:
03/02/2015
Publication #:
Pub Dt:
09/03/2015
Title:
METHOD OF CLEANING PLASMA PROCESSING APPARATUS
Assignors
1
Exec Dt:
02/19/2015
2
Exec Dt:
02/19/2015
3
Exec Dt:
02/21/2015
4
Exec Dt:
02/19/2015
5
Exec Dt:
02/23/2015
Assignee
1
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
ROTHWELL, FIGG, ERNST & MANBECK, P.C.
607 14TH STREET, N.W.
SUITE 800
WASHINGTON, DC 20005

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