Patent Assignment Details
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Reel/Frame: | 035078/0016 | |
| Pages: | 3 |
| | Recorded: | 03/03/2015 | | |
Attorney Dkt #: | 1022.0053C |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/13/2016
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Application #:
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14636927
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Filing Dt:
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03/03/2015
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Publication #:
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Pub Dt:
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11/12/2015
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Title:
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Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
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Assignee
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14-1 SOTOKANDA |
4-CHOME, CHIYODA-KU |
TOKYO, JAPAN 1018980 |
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Correspondence name and address
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JANET DORGAN
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9801 WASHINGTONIAN BLVD.
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SUITE 750
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GAITHERSBURG, MD 20878
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