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Patent #:
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Issue Dt:
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07/30/1996
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Application #:
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08349446
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Filing Dt:
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12/05/1994
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Title:
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IMMERSION-TYPE APPARATUS FOR PROCESSING SUBSTRATES
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Patent #:
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Issue Dt:
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10/22/1996
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Application #:
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08363535
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Filing Dt:
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12/23/1994
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Title:
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METHOD AND APPARATUS FOR MEASURING INSULATION FILM THICKNESS OF SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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10/15/1996
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Application #:
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08368110
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Filing Dt:
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01/03/1995
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Title:
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METHOD OF AND APPARAUS FOR PREVENTING FORGERY OF SPECIFIC IMAGE
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Patent #:
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Issue Dt:
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01/21/1997
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Application #:
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08393331
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Filing Dt:
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02/23/1995
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Title:
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METHOD AND APPARATUS FOR SIMULATING COLOR PRINT
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Patent #:
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Issue Dt:
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09/16/1997
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Application #:
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08417800
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Filing Dt:
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04/06/1995
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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11/11/1997
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Application #:
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08418512
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Filing Dt:
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04/07/1995
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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04/02/1996
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Application #:
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08460053
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Filing Dt:
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06/02/1995
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Title:
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APPARATUS AND METHOD FOR ELECTRICAL MEASUREMENT OF SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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06/17/1997
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Application #:
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08461066
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Filing Dt:
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06/05/1995
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Title:
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PROCESSING APPARATUS HAVING PARTS FOR THERMAL AND NON-THERMAL TREATMENT OF SUBSTRATES
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Patent #:
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Issue Dt:
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11/18/1997
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Application #:
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08464080
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Filing Dt:
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06/05/1995
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Title:
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APPARATUS FOR COATING SUBSTRATE
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Patent #:
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Issue Dt:
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02/03/1998
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Application #:
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08490830
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Filing Dt:
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06/15/1995
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Title:
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CONCENTRATION CONTROLLING METHOD AND A SUBSTRATE TREATING APPARATUS UTILIZING SAME
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Patent #:
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Issue Dt:
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07/15/1997
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Application #:
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08495216
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Filing Dt:
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06/28/1995
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Title:
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APPARATUS FOR CLEANING SUBSTRATES AND METHODS FOR ATTACHING/DETACHING AND CLEANING BRUSHES OF SUCH APPARATUS
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Patent #:
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Issue Dt:
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11/03/1998
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Application #:
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08529832
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Filing Dt:
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09/18/1995
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Title:
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SUBSTRATE SPIN CLEANING APPARATUS
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Patent #:
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Issue Dt:
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01/06/1998
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Application #:
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08578860
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Filing Dt:
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12/27/1995
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Title:
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SUBSTRATE HOLDER
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Patent #:
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Issue Dt:
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10/20/1998
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Application #:
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08610712
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Filing Dt:
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03/04/1996
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Title:
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SUBSTRATE PROCESSING DEVICE AND METHOD FOR SUBSTRATE FROM THE SUBSTRATE PROCESSING DEVICE
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Patent #:
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Issue Dt:
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02/17/1998
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Application #:
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08619887
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Filing Dt:
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03/20/1996
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Title:
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METHOD AND APPARATUS FOR CHANGING SPECIFIED COLOR IN A COLOR IMAGE
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Patent #:
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Issue Dt:
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01/19/1999
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Application #:
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08625644
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Filing Dt:
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03/29/1996
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Title:
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SUBSTRATE SPIN CLEANING APPARATUS
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Patent #:
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Issue Dt:
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01/12/1999
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Application #:
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08630488
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Filing Dt:
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04/10/1996
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Title:
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OPTICAL DEVICE USING A POINT LIGHT SOURCE
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Patent #:
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Issue Dt:
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09/01/1998
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Application #:
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08635307
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Filing Dt:
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04/19/1996
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Title:
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IMAGE RECORDING APPARATUS CAPABLE OF ADJUSTING AN IMAGE RECORDING SPEED
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Patent #:
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Issue Dt:
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12/29/1998
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Application #:
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08644376
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Filing Dt:
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05/10/1996
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Title:
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SUBSTRATE SPIN TREATING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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07/28/1998
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Application #:
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08646131
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Filing Dt:
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05/17/1996
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Title:
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SUBSTRATE SPIN CLEANING APPARATUS
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Patent #:
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Issue Dt:
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11/02/1999
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Application #:
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08659687
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Filing Dt:
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06/06/1996
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Title:
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SUBSTRATE TRANDFER AND BATH APPARATUS
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Patent #:
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Issue Dt:
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06/09/1998
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Application #:
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08665474
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Filing Dt:
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06/18/1996
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Title:
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ULTRAVIOLET IRRADIATOR FOR SUBSTRATE, SUBSTRATE TREATMENT SYSTEM, AND METHOD OF IRRADIATING SUBSTRATE WITH ULTRAVIOLET LIGHT
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Patent #:
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Issue Dt:
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06/09/1998
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Application #:
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08677924
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Filing Dt:
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07/10/1996
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Title:
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APPARATUS FOR REMOVING LIQUID FROM SUBSTRATES
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Patent #:
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Issue Dt:
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10/13/1998
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Application #:
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08682881
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Filing Dt:
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07/11/1996
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Title:
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SYSTEM FOR ENGRAVING A PLURALITY OF GRAVURE ROLLS
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Patent #:
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Issue Dt:
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11/24/1998
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Application #:
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08688749
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Filing Dt:
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07/31/1996
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Title:
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SUBSTRATE CONTAINER CASSETTE, INTERFACE MECHANISM, AND SUBSTRATE PROCESSING
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Patent #:
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Issue Dt:
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10/14/1997
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Application #:
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08699728
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Filing Dt:
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08/19/1996
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Title:
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SUBSTRATE SPIN TREATING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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08/04/1998
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Application #:
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08704261
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Filing Dt:
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08/28/1996
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Title:
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SUBSTRATE TRANSFER METHOD AND INTERFACE APPARATUS
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Patent #:
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Issue Dt:
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03/09/1999
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Application #:
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08707647
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Filing Dt:
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09/05/1996
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Title:
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METHOD FOR PREPARING MULTI-COMPOSED IMAGES WITHOUT USE OF A PHOTO- COMPOSER
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Patent #:
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Issue Dt:
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09/15/1998
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Application #:
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08715547
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Filing Dt:
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09/19/1996
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Title:
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METHOD OF CORRECTING CURVATURE OF IMAGE SURFACE AND OPTICAL BEAM SCANNING APPARATUS FOR USE WITH THE SAME
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Patent #:
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Issue Dt:
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12/30/1997
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Application #:
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08720317
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Filing Dt:
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09/27/1996
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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08725846
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Filing Dt:
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10/04/1996
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Title:
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SUBSTRATE DEVELOPING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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10/31/2000
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Application #:
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08727141
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Filing Dt:
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10/08/1996
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Title:
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IMAGE PROCESSING USING ADJOINING RELATIONSHIPS BETWEEN IMAGE PARTS
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Patent #:
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Issue Dt:
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04/27/1999
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Application #:
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08729588
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Filing Dt:
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10/11/1996
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Title:
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METHOD AND APPARATUS FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/04/1998
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Application #:
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08731245
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Filing Dt:
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10/11/1996
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Title:
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SUBSTRATE SPIN TREATING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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12/01/1998
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Application #:
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08739866
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Filing Dt:
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10/31/1996
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Title:
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DIGITAL PRINTER
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08749348
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Filing Dt:
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11/21/1996
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Title:
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SUBSTRATE PROCESSING APPARATUS AND AIR SUPPLY METHOD IN SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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06/09/1998
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Application #:
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08753706
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Filing Dt:
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11/27/1996
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Title:
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TREATING LIQUID SUPPLYING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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02/02/1999
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Application #:
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08757069
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Filing Dt:
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11/26/1996
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Title:
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SUBSTRATE PROCESSING MANAGEMENT SYSTEM WITH RECIPE COPYING FUNCTIONS
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Patent #:
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Issue Dt:
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02/08/2000
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Application #:
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08760643
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Filing Dt:
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12/04/1996
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Title:
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SUBSTRATE TREATING APPARATUS AND METHOD FOR TREATING SUBSTRATE
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Patent #:
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Issue Dt:
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03/30/1999
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Application #:
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08762164
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Filing Dt:
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12/09/1996
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Title:
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METHOD OF AND AN APPARATUS FOR PROCESSING A SUBSTRATE
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Patent #:
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Issue Dt:
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05/25/1999
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Application #:
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08785895
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Filing Dt:
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01/21/1997
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Title:
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IMAGE MATCHING WITH EQUIVALENT SHARPNESS ENHANCEMENT
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Patent #:
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Issue Dt:
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06/09/1998
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Application #:
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08803618
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Filing Dt:
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02/21/1997
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Title:
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TREATING SOLUTION SUPPLYING METHOD AND SUBSTRATE TREATING APPARATUS
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|
|
|
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Patent #:
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Issue Dt:
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12/08/1998
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Application #:
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08816555
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Filing Dt:
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03/13/1997
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Title:
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SUBSTRATE SPIN TREATING APPARATUS
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|
|
|
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Patent #:
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|
Issue Dt:
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11/28/2000
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Application #:
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08839470
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Filing Dt:
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04/14/1997
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|
Title:
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METHOD OF AND APPARATUS FOR CLEANING SUBSTRATE
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|
|
|
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Patent #:
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Issue Dt:
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03/02/1999
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Application #:
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08877008
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Filing Dt:
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06/16/1997
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Title:
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SUBSTRATE TREATING APPARATUS
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|
|
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Patent #:
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Issue Dt:
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10/19/1999
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Application #:
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08895910
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Filing Dt:
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07/17/1997
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Title:
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IMAGE INSPECTION APPARATUS IN PLATE MAKING PROCESS AND IMAGE INSPECTION METHOD IN PLATE MAKING PROCESS
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|
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Patent #:
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Issue Dt:
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04/25/2000
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Application #:
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08938900
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Filing Dt:
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09/26/1997
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Title:
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ATMOSPHERE CONCENTRATION MONITORING FOR SUBSTRATE PROCESSING APPARATUS AND LIFE DETERMINATION FOR ATMOSPHERE PROCESSING UNIT OF SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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06/29/1999
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Application #:
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08944229
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Filing Dt:
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10/06/1997
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Title:
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SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
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08/31/1999
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Application #:
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08957353
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Filing Dt:
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10/24/1997
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Title:
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SUBSTRATE PROCESSING APPARATUS
|
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|
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Patent #:
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Issue Dt:
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05/30/2000
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Application #:
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08965249
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Filing Dt:
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11/06/1997
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|
Title:
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AN APPARATUS AND METHOD FOR DRYING SUBSTRATES
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|
|
|
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Patent #:
|
|
Issue Dt:
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07/27/1999
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Application #:
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08972780
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Filing Dt:
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11/18/1997
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Title:
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ULTRASONIC VIBRATOR, ULTASONIC CLEANING NOZZLE, ULTRASONIC CLEANING DEVICE, SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING TREATMENT SYSTEM AND ULTRASONIC CLEANING NOZZLE MANUFACTURING METHOD
|
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Patent #:
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Issue Dt:
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08/08/2000
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Application #:
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08993284
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Filing Dt:
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12/18/1997
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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10/05/1999
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Application #:
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09009100
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Filing Dt:
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01/20/1998
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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11/16/1999
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Application #:
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09013113
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Filing Dt:
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01/26/1998
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Title:
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TREATING SOLUTION SUPPLYING METHOD AND APPARATUS
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|
|
|
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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09014485
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Filing Dt:
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01/28/1998
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Title:
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THERMAL PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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09014487
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Filing Dt:
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01/28/1998
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Title:
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GRINDING PROCESS MONITORING SYSTEM AND GRINDING PROCESS MONITORING METHOD
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|
|
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Patent #:
|
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Issue Dt:
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05/09/2000
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Application #:
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09039141
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Filing Dt:
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03/13/1998
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Title:
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SUBSTRATE PROCESSING APPARATUS
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|
|
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Patent #:
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Issue Dt:
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04/18/2000
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Application #:
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09039824
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Filing Dt:
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03/16/1998
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Title:
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SUBSTRATE PROCESSING APPARATUS SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE TRANSFER APPARATUS
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|
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Patent #:
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Issue Dt:
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06/13/2000
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Application #:
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09044812
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Filing Dt:
|
03/20/1998
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|
Title:
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APPARATUS FOR PROCESSING SUBSTRATES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/14/2000
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Application #:
|
09046348
|
Filing Dt:
|
03/23/1998
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|
Title:
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MEASUREMENT OF ELECTRICAL CHARACTERISTICS OF SEMICONDUCTOR WAFER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/11/2000
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Application #:
|
09059897
|
Filing Dt:
|
04/14/1998
|
|
Title:
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SUBSTRATE PROCESSING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/16/2000
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Application #:
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09060422
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Filing Dt:
|
04/14/1998
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|
Title:
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SUBSTRATE HEAT-TREATING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/18/2000
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Application #:
|
09062475
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Filing Dt:
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04/17/1998
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|
Title:
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DEVELOPING APPARATUS, DEVELOPING METHOD AND SUBSTRATE PROCESSING APPARATUS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
09/11/2001
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Application #:
|
09071683
|
Filing Dt:
|
05/01/1998
|
|
Title:
|
SUBSTRATE CLEANING APPARATUS AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2001
|
Application #:
|
09107854
|
Filing Dt:
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06/30/1998
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Title:
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APPARATUS FOR DETERMINING IMAGE PROCESSING PARAMETER, METHOD OF THE SAME, AND COMPUTER PROGRAM PRODUCT FOR REALIZING THE METHOD
|
|
|
|
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Patent #:
|
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Issue Dt:
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04/02/2002
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Application #:
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09113616
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Filing Dt:
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07/10/1998
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Title:
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METHOD OF COLOR CONVERSION, APPARATUS FOR THE SAME, AND COMPUTER PROGRAM PRODUCT FOR REALIZING THE METHOD
|
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Patent #:
|
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Issue Dt:
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06/20/2000
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Application #:
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09121881
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Filing Dt:
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07/24/1998
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Title:
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METHOD OF AND APPARATUS FOR SUPPLYING DEVELOPING SOLUTION ONTO SUBSTRATE
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Patent #:
|
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Issue Dt:
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12/12/2000
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Application #:
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09131558
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Filing Dt:
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08/10/1998
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Title:
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SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
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04/16/2002
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Application #:
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09143027
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Filing Dt:
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08/28/1998
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Title:
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SUBSTRATE PROCESSING APPARATUS
|
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|
|
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Patent #:
|
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Issue Dt:
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09/05/2000
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Application #:
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09145896
|
Filing Dt:
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09/02/1998
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Title:
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IMAGE PROCESSING USING PARAMETERS RELATED TO IMAGE INPUT AND OUTPUT DEVICES
|
|
|
|
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Patent #:
|
|
Issue Dt:
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12/05/2000
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Application #:
|
09149772
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Filing Dt:
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09/08/1998
|
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Title:
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SUBSTRATE PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS USING THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/26/2001
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Application #:
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09151183
|
Filing Dt:
|
09/10/1998
|
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Title:
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SUBSTRATE TRANSPORT METHOD AND APPARATUS
|
|
|
|
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Patent #:
|
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Issue Dt:
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10/31/2000
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Application #:
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09180032
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Filing Dt:
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10/30/1998
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09195190
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Filing Dt:
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11/17/1998
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Title:
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SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
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Patent #:
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Issue Dt:
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04/10/2001
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Application #:
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09366459
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Filing Dt:
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08/03/1999
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Title:
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DRAWING APPARATUS AND DRAWING METHOD
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Patent #:
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Issue Dt:
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12/26/2000
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Application #:
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09366839
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Filing Dt:
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08/04/1999
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Title:
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DRAWING APPARATUS HAVING FIXING MEMBER FOR CLAMPING MATERIAL ON
DRUM AND METHOD OF MOUNTING MATERIAL
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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09572484
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Filing Dt:
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05/16/2000
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Title:
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IMAGE PROCESSING USING ADJOINING RELATIONSHIPS BETWEEN IMAGE PARTS
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Patent #:
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Issue Dt:
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01/01/2002
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Application #:
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09614624
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Filing Dt:
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07/12/2000
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Title:
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DRAWING APPARATUS HAVING FIXING MEMBER FOR CLAMPING MATERIAL ON DRUM
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Patent #:
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Issue Dt:
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10/16/2001
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Application #:
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09716606
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Filing Dt:
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11/20/2000
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Title:
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Image scanning apparatus, method of scanning images, and recording medium for realizing the method
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Patent #:
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Issue Dt:
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10/15/2002
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Application #:
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09782848
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Filing Dt:
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02/14/2001
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Publication #:
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Pub Dt:
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08/30/2001
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Title:
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INDUCTIVE HEAT GENERATOR USING INTERNALLY LOCATED HEAT SENSOR
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Patent #:
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Issue Dt:
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02/11/2003
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Application #:
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09788086
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Filing Dt:
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02/16/2001
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Publication #:
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Pub Dt:
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10/11/2001
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Title:
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HEAT TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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09/14/2004
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Application #:
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09942153
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Filing Dt:
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08/29/2001
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Publication #:
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Pub Dt:
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12/19/2002
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Title:
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE INSPECTION METHOD AND SUBSTRATE PROCESING SYSTEM
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Patent #:
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Issue Dt:
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09/14/2004
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Application #:
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09962961
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Filing Dt:
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09/25/2001
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Publication #:
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Pub Dt:
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03/28/2002
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Title:
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METHOD OF AND APPRATUS FOR PROCESSING SUBSTRATE
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Patent #:
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Issue Dt:
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05/04/2004
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Application #:
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09976134
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Filing Dt:
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10/11/2001
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Publication #:
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Pub Dt:
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02/21/2002
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Title:
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CLEANING NOZZLE AND SUBSTRATE CLEANING APPARATUS
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Patent #:
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Issue Dt:
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01/28/2003
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Application #:
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10047604
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Filing Dt:
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01/16/2002
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Publication #:
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Pub Dt:
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07/25/2002
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
|
09/14/2004
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Application #:
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10047818
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Filing Dt:
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01/15/2002
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Publication #:
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Pub Dt:
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07/18/2002
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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|
|
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Patent #:
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Issue Dt:
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02/17/2004
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Application #:
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10090099
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Filing Dt:
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02/28/2002
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Publication #:
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Pub Dt:
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09/05/2002
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
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03/30/2004
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Application #:
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10121778
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Filing Dt:
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04/11/2002
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
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Patent #:
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Issue Dt:
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05/06/2003
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Application #:
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10125229
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Filing Dt:
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04/18/2002
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Publication #:
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Pub Dt:
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10/24/2002
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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|
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Patent #:
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|
Issue Dt:
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05/03/2005
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Application #:
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10141213
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Filing Dt:
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05/07/2002
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Publication #:
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Pub Dt:
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11/21/2002
| | | | |
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Title:
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SCHEDULING METHOD AND PROGRAM FOR A SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/13/2005
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Application #:
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10155643
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Filing Dt:
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05/22/2002
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Publication #:
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Pub Dt:
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12/19/2002
| | | | |
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Title:
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SUBSTRATE CLEANING APPARATUS AND METHOD
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|
|
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Patent #:
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|
Issue Dt:
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07/05/2005
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Application #:
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10170776
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Filing Dt:
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06/12/2002
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Publication #:
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Pub Dt:
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12/19/2002
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD INCLUDING A DEVICE FOR APPLYING A COATING AND A DEVICE FOR MEASURING THE FILM QUALITY OF THE COATING
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|
|
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Patent #:
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Issue Dt:
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05/16/2006
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Application #:
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10189975
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Filing Dt:
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07/02/2002
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Publication #:
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Pub Dt:
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01/30/2003
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Title:
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SUBSTRATE PROCESSING SYSTEM MANAGING APPARATUS INFORMATION OF SUBSTRATE PROCESSING APPARATUS
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|
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Patent #:
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Issue Dt:
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01/11/2005
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Application #:
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10201383
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Filing Dt:
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07/23/2002
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Publication #:
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Pub Dt:
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01/30/2003
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Title:
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SUBSTRATE PROCESSING APPARATUS EQUIPPING WITH HIGH-PRESSURE PROCESSING UNIT
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|
|
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Patent #:
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Issue Dt:
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09/12/2006
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Application #:
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10202279
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Filing Dt:
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07/22/2002
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Publication #:
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Pub Dt:
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01/23/2003
| | | | |
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Title:
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SUBSTRATE TREATING METHOD AND APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
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08/09/2005
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Application #:
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10216002
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Filing Dt:
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08/08/2002
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Publication #:
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Pub Dt:
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03/27/2003
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Title:
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THIN FILM FORMING APPARATUS AND THIN FILM FORMING METHOD
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|
|
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Patent #:
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Issue Dt:
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10/09/2007
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Application #:
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10232319
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Filing Dt:
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08/29/2002
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Publication #:
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Pub Dt:
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03/06/2003
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Title:
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SUBSTRATE PROCESSING SYSTEM MANAGING APPARATUS INFORMATION OF SUBSTRATE PROCESSING APPARATUS
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|
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Patent #:
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|
Issue Dt:
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10/19/2004
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Application #:
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10241224
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Filing Dt:
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09/10/2002
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Publication #:
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Pub Dt:
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03/20/2003
| | | | |
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Title:
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SCHEDULING METHOD AND PROGRAM FOR A SUBSTRATE PROCESSING APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
|
07/19/2005
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Application #:
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10263513
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Filing Dt:
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10/01/2002
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Publication #:
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Pub Dt:
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05/01/2003
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Title:
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THIN FILM FORMING APPARATUS AND THIN FILM FORMING METHOD
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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10270885
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Filing Dt:
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10/11/2002
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Publication #:
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Pub Dt:
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09/11/2003
| | | | |
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Title:
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APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
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