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Patent #:
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Issue Dt:
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09/21/2004
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Application #:
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10281473
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Filing Dt:
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10/25/2002
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Publication #:
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Pub Dt:
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05/01/2003
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/09/2008
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Application #:
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10286873
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Filing Dt:
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10/30/2002
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Publication #:
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Pub Dt:
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05/08/2003
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Title:
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SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
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Patent #:
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Issue Dt:
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08/14/2007
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Application #:
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10290435
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Filing Dt:
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11/07/2002
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Publication #:
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Pub Dt:
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05/15/2003
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Title:
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HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD OF SUBSTRATE
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Patent #:
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Issue Dt:
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11/14/2006
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Application #:
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10299638
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Filing Dt:
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11/19/2002
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Publication #:
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Pub Dt:
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05/29/2003
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Title:
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SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING APPARATUS AND HOLDING TABLE
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Patent #:
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Issue Dt:
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07/08/2008
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Application #:
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10329667
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Filing Dt:
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12/23/2002
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Publication #:
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Pub Dt:
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07/03/2003
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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11/27/2007
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Application #:
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10335658
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Filing Dt:
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12/30/2002
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Publication #:
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Pub Dt:
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09/18/2003
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Title:
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SUBSTRATE TREATING APPARATUS WITH CIRCULATING AND HEATING MECHANISM FOR REMOVAL LIQUID
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Patent #:
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Issue Dt:
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02/14/2006
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Application #:
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10347610
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Filing Dt:
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01/20/2003
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Publication #:
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Pub Dt:
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10/02/2003
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Title:
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THERMAL PROCESSING APPARATUS AND THERMAL PROCESSING METHOD
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Patent #:
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Issue Dt:
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04/12/2005
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Application #:
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10347845
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Filing Dt:
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01/17/2003
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Publication #:
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Pub Dt:
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07/17/2003
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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10353151
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Filing Dt:
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01/28/2003
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Publication #:
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Pub Dt:
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07/31/2003
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Title:
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CHEMICAL TREATING APPARATUS
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Patent #:
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Issue Dt:
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07/11/2006
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Application #:
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10355960
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Filing Dt:
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01/30/2003
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Publication #:
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Pub Dt:
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07/31/2003
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Title:
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SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
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05/02/2006
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Application #:
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10357524
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Filing Dt:
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02/03/2003
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Publication #:
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Pub Dt:
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08/07/2003
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Title:
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THERMAL PROCESSING APPARATUS AND THERMAL PROCESSING METHOD
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Patent #:
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Issue Dt:
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09/13/2005
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Application #:
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10382611
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Filing Dt:
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03/05/2003
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Publication #:
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Pub Dt:
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09/18/2003
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Title:
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SUBSTRATE TREATING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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03/22/2005
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Application #:
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10387200
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Filing Dt:
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03/11/2003
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Publication #:
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Pub Dt:
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09/16/2004
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Title:
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THIN FILM FORMING APPARATUS, FILM SUPPLIER, FILM CASSETTE, TRANSPORT MECHANISM AND TRANSPORT METHOD
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Patent #:
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Issue Dt:
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11/09/2004
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Application #:
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10394313
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Filing Dt:
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03/20/2003
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Publication #:
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Pub Dt:
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10/02/2003
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Title:
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SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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10394895
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Filing Dt:
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03/21/2003
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Publication #:
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Pub Dt:
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10/02/2003
| | | | |
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Title:
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THERMAL PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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10417460
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Filing Dt:
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04/16/2003
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Publication #:
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Pub Dt:
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11/20/2003
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Title:
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SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
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06/22/2004
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Application #:
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10427049
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Filing Dt:
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04/30/2003
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Publication #:
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Pub Dt:
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11/27/2003
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/07/2007
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Application #:
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10452876
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Filing Dt:
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06/02/2003
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Publication #:
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Pub Dt:
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12/04/2003
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Title:
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APPARATUS AND METHOD FOR DEFECT DETECTION AND PROGRAM THEREOF
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Patent #:
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Issue Dt:
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12/21/2004
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Application #:
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10458719
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Filing Dt:
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06/09/2003
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Publication #:
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Pub Dt:
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01/08/2004
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Title:
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SUBSTRATE TREATING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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10459833
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Filing Dt:
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06/11/2003
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Publication #:
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Pub Dt:
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01/01/2004
| | | | |
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Title:
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SYSTEM FOR AND METHOD OF PROCESSING SUBSTRATE
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10460292
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Filing Dt:
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06/11/2003
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Publication #:
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Pub Dt:
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12/25/2003
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Title:
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THERMAL PROCESSING METHOD AND THERMAL PROCESSING APPARATUS FOR SUBSTRATED EMPLOYING PHOTOIRRADIATION
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Patent #:
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Issue Dt:
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07/03/2007
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Application #:
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10463064
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Filing Dt:
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06/17/2003
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Publication #:
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Pub Dt:
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12/25/2003
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Title:
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SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD OF INERT GAS CONCENTRATION
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Patent #:
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Issue Dt:
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11/08/2011
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Application #:
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10541507
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Filing Dt:
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07/08/2005
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Publication #:
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Pub Dt:
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07/13/2006
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Title:
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SUBSTRATE TREATING SYSTEM, SUBSTRATE TREATING DEVICE, PROGRAM, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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10/09/2007
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Application #:
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10620728
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Filing Dt:
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07/16/2003
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Publication #:
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Pub Dt:
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04/15/2004
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Title:
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PLATING APPARATUS, CARTRIDGE AND COPPER DISSOLUTION TANK FOR USE IN THE PLATING APPARATUS, AND PLATING METHOD
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Patent #:
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Issue Dt:
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04/26/2005
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Application #:
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10620874
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Filing Dt:
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07/16/2003
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Publication #:
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Pub Dt:
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01/22/2004
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Title:
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THERMAL PROCESSING APPARATUS PERFORMING IRRADIATING A SUBSTRATE WITH LIGHT
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Patent #:
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Issue Dt:
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01/18/2005
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Application #:
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10621429
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Filing Dt:
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07/17/2003
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Publication #:
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Pub Dt:
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01/29/2004
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Title:
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THERMAL PROCESSING APPARATUS FOR SUBSTRATE EMPLOYING PHOTOIRRADIATION
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Patent #:
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Issue Dt:
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03/28/2006
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Application #:
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10623927
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Filing Dt:
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07/21/2003
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Publication #:
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Pub Dt:
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08/19/2004
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Title:
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SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10624871
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Filing Dt:
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07/21/2003
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Publication #:
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Pub Dt:
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01/29/2004
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Title:
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FILM THICKNESS MEASURING METHOD, RELATIVE DIELECTRIC CONSTANT MEASURING METHOD, FILM THICKNESS MEASURING APPARATUS, AND RELATIVE DIELECTRIC CONSTANT MEASURING APPARATUS
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Patent #:
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Issue Dt:
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02/24/2009
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Application #:
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10631797
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Filing Dt:
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07/31/2003
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Publication #:
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Pub Dt:
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02/19/2004
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Title:
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SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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10645067
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08/21/2003
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Publication #:
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Pub Dt:
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02/26/2004
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Title:
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LIGHT IRRADIATION TYPE THERMAL PROCESSING APPARATUS
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01/04/2005
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Application #:
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10646902
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Filing Dt:
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08/22/2003
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Publication #:
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Pub Dt:
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02/26/2004
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Title:
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SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
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10/12/2010
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Application #:
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10648918
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08/27/2003
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Pub Dt:
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03/04/2004
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD DRYING SUBSTRATE
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Patent #:
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Issue Dt:
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09/08/2009
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Application #:
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10659213
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Filing Dt:
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09/10/2003
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Publication #:
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Pub Dt:
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03/18/2004
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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06/13/2006
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Application #:
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10661240
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Filing Dt:
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09/11/2003
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Publication #:
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Pub Dt:
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06/03/2004
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Title:
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PHOTOIRRADIATION THERMAL PROCESSING APPARATUS AND THERMAL PROCESSING SUSCEPTOR EMPLOYED THEREFOR
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Patent #:
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Issue Dt:
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06/07/2005
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Application #:
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10668551
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Filing Dt:
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09/22/2003
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Publication #:
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Pub Dt:
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03/25/2004
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Title:
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METHOD OF REMOVING METAL ION AND APPARATUS FOR TREATING SUBSTRATE
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Patent #:
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Issue Dt:
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05/12/2009
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Application #:
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10669520
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Filing Dt:
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09/24/2003
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Publication #:
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Pub Dt:
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03/25/2004
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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05/23/2006
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Application #:
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10680322
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Filing Dt:
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10/07/2003
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Publication #:
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Pub Dt:
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09/02/2004
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Title:
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CHEMICAL PUMP AND METHOD OF DISCHARGING CHEMICAL SOLUTION
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09/11/2007
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10681450
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Filing Dt:
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10/08/2003
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Publication #:
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Pub Dt:
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04/15/2004
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Title:
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SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
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04/28/2009
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Application #:
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10690912
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Filing Dt:
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10/22/2003
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Publication #:
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Pub Dt:
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05/06/2004
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Title:
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SUBSTRATE PROCESSING METHOD USING ALKALINE SOLUTION AND ACID SOLUTION
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10726920
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Filing Dt:
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12/02/2003
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Publication #:
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Pub Dt:
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06/24/2004
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Title:
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SUBSTRATE PROCESSING APPARATUS, OPERATION METHOD THEREOF AND PROGRAM
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Patent #:
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02/22/2005
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Application #:
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10729460
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12/05/2003
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Publication #:
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Pub Dt:
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06/17/2004
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Title:
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APPARATUS FOR AND METHOD OF HEAT TREATMENT BY LIGHT IRRADIATION
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Patent #:
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Issue Dt:
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09/02/2008
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Application #:
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10740711
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Filing Dt:
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12/18/2003
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Publication #:
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Pub Dt:
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08/26/2004
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Title:
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SUBSTRATE PROCESSING APPARATUS FOR DRYING SUBSTRATE
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Issue Dt:
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06/27/2006
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Application #:
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10769390
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Filing Dt:
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01/30/2004
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Publication #:
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Pub Dt:
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09/23/2004
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Title:
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METHOD OF TRANSPORTING AND PROCESSING SUBSTRATES IN SUBSTRATE PROCESSING APPARATUS
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08/15/2006
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10780420
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02/17/2004
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Pub Dt:
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09/02/2004
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Title:
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HEAT TREATMENT APPARATUS BY MEANS OF LIGHT IRRADIATION
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04/27/2010
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10813323
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03/29/2004
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Pub Dt:
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09/30/2004
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Title:
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SUBSTRATE PROCESSING APPARATUS
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09/11/2007
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10836146
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04/30/2004
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11/18/2004
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Title:
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TREATING SOLUTION SUPPLY NOZZLE, A SUBSTRATE TREATING APPARATUS HAVING THIS NOZZLE, AND A METHOD OF MANUFACTURING A TREATING SOLUTION SUPPLY NOZZLE
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05/15/2007
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10844753
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05/12/2004
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12/02/2004
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Title:
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SUBSTRATE PROCESSING APPARATUS AND THERMAL TYPE FLOWMETER SUITABLE TO THE SAME
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04/29/2008
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10846874
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05/13/2004
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Pub Dt:
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11/18/2004
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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07/04/2006
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10850632
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05/20/2004
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Publication #:
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Pub Dt:
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12/30/2004
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Title:
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LIGHT IRRADIATION TYPE THERMAL PROCESSING APPARATUS AND METHOD OF ADJUSTING LIGHT IRRADIATION INTENSITY
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Patent #:
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Issue Dt:
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09/29/2009
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Application #:
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10860267
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Filing Dt:
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06/02/2004
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Publication #:
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Pub Dt:
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12/30/2004
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Title:
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SUBSTRATE DETECTING APPARATUS AND METHOD, SUBSTRATE TRANSPORTING APPARATUS AND METHOD, AND SUBSTRATE PROCESSING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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06/12/2007
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10881234
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Filing Dt:
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06/30/2004
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Publication #:
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Pub Dt:
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01/27/2005
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Title:
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MEASURING METHOD AND MEASURING APPARATUS OF OPTICAL ENERGY ABSORPTION RATIO, AND THERMAL PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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06/27/2006
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Application #:
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10926639
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Filing Dt:
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08/26/2004
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Publication #:
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Pub Dt:
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03/03/2005
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Title:
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HEAT TREATMENT APPARATUS OF LIGHT-EMISSION TYPE AND METHOD OF CLEANING SAME
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Patent #:
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Issue Dt:
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05/03/2011
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10940095
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09/14/2004
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Pub Dt:
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03/24/2005
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Title:
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APPARATUS AND METHOD FOR THERMAL PROCESSING OF SUBSTRATE
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Issue Dt:
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10/31/2006
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03/24/2005
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03/24/2005
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03/24/2005
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07/14/2005
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08/31/2006
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11/30/2006
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