Patent Assignment Details
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| Reel/Frame: | 035392/0730 | |
| Pages: | 2 |
| | Recorded: | 04/13/2015 | | |
| Attorney Dkt #: | 104349.67707US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/29/2015
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Application #:
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14435203
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Filing Dt:
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04/13/2015
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Publication #:
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Pub Dt:
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10/08/2015
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Title:
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Charged Particle Beam Device and Overlay Misalignment Measurement Method
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Assignee
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| 24-14, NISHI SHIMBASHI 1-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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Correspondence name and address
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CROWELL & MORING LLP
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1001 PENNSYLVANIA AVENUE, NW
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WASHINGTON, DC 20004-2595
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