Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 035445/0923 | |
| Pages: | 2 |
| | Recorded: | 04/20/2015 | | |
| Attorney Dkt #: | LAM2P872 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/08/2018
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Application #:
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14675659
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Filing Dt:
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03/31/2015
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Publication #:
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Pub Dt:
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10/06/2016
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Title:
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GAS REACTION TRAJECTORY CONTROL THROUGH TUNABLE PLASMA DISSOCIATION FOR WAFER BY-PRODUCT DISTRIBUTION AND ETCH FEATURE PROFILE UNIFORMITY
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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JOSE NUNEZ
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710 LAKEWAY DR.
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STE. 200
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SUNNYVALE, CA 94085
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