Patent Assignment Details
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| Reel/Frame: | 035611/0421 | |
| Pages: | 6 |
| | Recorded: | 05/11/2015 | | |
| Attorney Dkt #: | NUFL/0016US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/23/2016
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Application #:
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14709200
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Filing Dt:
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05/11/2015
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Publication #:
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Pub Dt:
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11/12/2015
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Title:
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CHARGED PARTICLE BEAM WRITING APPARATUS, AND METHOD FOR DETECTING IRREGULARITIES IN DOSE OF CHARGED PARTICLE BEAM
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Assignee
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| 8-1, SHIN SUGITA CHO |
| ISOGO-KU, KANAGAWA |
| YOKOHAMA, JAPAN 235-8522 |
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Correspondence name and address
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PATTERSON & SHERIDAN, L.L.P.
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24 GREENWAY PLAZA, SUITE 1600
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HOUSTON, TX 77046
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