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Reel/Frame:035796/0904   Pages: 6
Recorded: 06/05/2015
Attorney Dkt #:SHOBA2.042D1
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/22/2016
Application #:
14626383
Filing Dt:
02/19/2015
Publication #:
Pub Dt:
06/11/2015
Title:
DEVELOPING SOLUTION FOR PHOTOLITHOGRAPHY, METHOD FOR FORMING RESIST PATTERN, AND METHOD AND APPARATUS FOR PRODUCING DEVELOPING SOLUTION FOR PHOTOLITHOGRAPHY
Assignors
1
Exec Dt:
06/03/2015
2
Exec Dt:
06/03/2015
3
Exec Dt:
06/03/2015
Assignee
1
150 NAKAMARUKO
NAKAHARA-KU, KANAGAWA
KAWASAKI-SHI, JAPAN 211-0012
Correspondence name and address
KNOBBE, MARTENS, OLSON & BEAR, LLP
2040 MAIN ST
14TH FLOOR
IRVINE, CA 92614

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