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Reel/Frame:035951/0280   Pages: 11
Recorded: 06/23/2015
Attorney Dkt #:166397
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
12/27/2016
Application #:
14647290
Filing Dt:
05/26/2015
Publication #:
Pub Dt:
10/22/2015
Title:
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
Assignors
1
Exec Dt:
06/10/2015
2
Exec Dt:
05/25/2015
3
Exec Dt:
06/02/2015
Assignee
1
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU
TOKYO, JAPAN 101-8980
Correspondence name and address
JAMES A. OLIFF
OLIFF PLC
P.O. BOX 320850
ALEXANDRIA, VA 22320-4850

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