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Reel/Frame:035986/0227   Pages: 4
Recorded: 06/22/2015
Attorney Dkt #:MAPS-54680
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
12/06/2016
Application #:
14744257
Filing Dt:
06/19/2015
Publication #:
Pub Dt:
12/24/2015
Title:
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND RECORDING MEDIUM
Assignors
1
Exec Dt:
06/15/2015
2
Exec Dt:
06/15/2015
3
Exec Dt:
06/16/2015
Assignee
1
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
PEARNE & GORDON LLP
1801 EAST 9TH STREET
SUITE 1200
CLEVELAND, OH 44114-3108

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