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Total properties:
11
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Patent #:
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Issue Dt:
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06/16/2009
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Application #:
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10526999
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Filing Dt:
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03/07/2005
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Publication #:
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Pub Dt:
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04/27/2006
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Title:
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METHOD OF INTRODUCING IMPURITY, DEVICE AND ELEMENT
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Patent #:
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Issue Dt:
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07/20/2010
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Application #:
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10569464
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Filing Dt:
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03/03/2006
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Publication #:
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Pub Dt:
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11/23/2006
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Title:
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METHOD FOR FORMING IMPURITY-INTRODUCED LAYER, METHOD FOR CLEANING OBJECT TO BE PROCESSED APPARATUS FOR INTRODUCING IMPURITY AND METHOD FOR PRODUCING DEVICE
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Patent #:
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Issue Dt:
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04/20/2010
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Application #:
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10572144
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Filing Dt:
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03/14/2006
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Publication #:
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Pub Dt:
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07/31/2008
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Title:
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IMPURITY INTRODUCING METHOD USING OPTICAL CHARACTERISTICS TO DETERMINE ANNEALING CONDITIONS
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Patent #:
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Issue Dt:
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03/23/2010
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Application #:
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10599205
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Filing Dt:
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09/22/2006
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Publication #:
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Pub Dt:
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06/19/2008
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Title:
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METHOD OF IMPURITY INTRODUCTION, IMPURITY INTRODUCTION APPARATUS AND SEMICONDUCTOR DEVICE PRODUCED WITH USE OF THE METHOD
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Patent #:
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Issue Dt:
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09/07/2010
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Application #:
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12158852
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Filing Dt:
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06/23/2008
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Publication #:
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Pub Dt:
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09/17/2009
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Title:
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PLASMA DOPING METHOD
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Patent #:
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Issue Dt:
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10/04/2011
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Application #:
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12517477
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Filing Dt:
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06/03/2009
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Publication #:
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Pub Dt:
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03/17/2011
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Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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03/20/2012
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Application #:
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12710482
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Filing Dt:
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02/23/2010
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Publication #:
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Pub Dt:
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06/17/2010
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Title:
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IMPURITY INTRODUCING APPARATUS HAVING FEEDBACK MECHANISM USING OPTICAL CHARACTERISTICS OF IMPURITY INTRODUCING REGION
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Patent #:
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Issue Dt:
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12/04/2012
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Application #:
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12866649
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Filing Dt:
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08/06/2010
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Publication #:
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Pub Dt:
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03/03/2011
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Title:
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SEMICONDUCTOR DEVICE HAVING A FIN-TYPE SEMICONDUCTOR REGION
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Patent #:
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Issue Dt:
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06/05/2012
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Application #:
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12922358
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Filing Dt:
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09/13/2010
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Publication #:
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Pub Dt:
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06/23/2011
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Title:
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METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND PLASMA DOPING SYSTEM
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Patent #:
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Issue Dt:
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02/28/2012
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Application #:
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12937169
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Filing Dt:
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10/08/2010
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Publication #:
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Pub Dt:
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06/23/2011
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Title:
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SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
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Patent #:
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Issue Dt:
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11/05/2013
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Application #:
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13264660
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Filing Dt:
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10/14/2011
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Publication #:
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Pub Dt:
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02/09/2012
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Title:
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METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND PLASMA DOPING APPARATUS
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