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Reel/Frame:036253/0254   Pages: 7
Recorded: 08/05/2015
Attorney Dkt #:HITACHI13-0000095US01
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/28/2020
Application #:
14765774
Filing Dt:
08/04/2015
Publication #:
Pub Dt:
12/24/2015
Title:
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND CLEANING COMPLETION DETERMINING METHOD
Assignors
1
Exec Dt:
08/03/2015
2
Exec Dt:
08/03/2015
3
Exec Dt:
08/03/2015
Assignee
1
14-1, SOTOKANDA 4-CHOME
CHIYODA-KU
TOKYO, JAPAN 101-8980
Correspondence name and address
VOLPE AND KOENIG, P.C.
UNITED PLAZA
30 SOUTH 17TH STREET
PHILADELPHIA, PA 19103

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