Patent Assignment Details
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| Reel/Frame: | 036509/0220 | |
| Pages: | 2 |
| | Recorded: | 09/08/2015 | | |
| Attorney Dkt #: | LAM2P885 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/04/2020
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Application #:
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14846697
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Filing Dt:
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09/04/2015
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Publication #:
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Pub Dt:
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03/09/2017
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Title:
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Plasma Excitation for Spatial Atomic Layer Deposition (ALD) Reactors
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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ALBERT S. PENILLA
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710 LAKEWAY DRIVE, SUITE 200
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SUNNYVALE, CA 94085
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