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Total properties:
19
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Patent #:
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Issue Dt:
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11/04/1997
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Application #:
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08621772
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Filing Dt:
|
03/22/1996
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Title:
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SINGLE BODY INJECTOR AND METHOD FOR DELIVERING GASES TO A SURFACE
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Patent #:
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Issue Dt:
|
07/28/1998
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Application #:
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08704227
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Filing Dt:
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08/27/1996
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Title:
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METHOD OF STRESS-RELIEVING SILICON OXIDE FILMS
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Patent #:
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Issue Dt:
|
08/17/1999
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Application #:
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08838882
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Filing Dt:
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04/14/1997
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Title:
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EXHAUST VENT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION SYSTEMS
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Patent #:
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Issue Dt:
|
08/10/1999
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Application #:
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08869085
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Filing Dt:
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06/04/1997
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Title:
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METHOD OF MANUFACTURING AN INJECTOR FOR CHEMICAL VAPOR DEPOSITION PROCESSING
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Patent #:
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Issue Dt:
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02/08/2000
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Application #:
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08892469
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Filing Dt:
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07/14/1997
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Title:
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SINGLE BODY INJECTOR AND METHOD FOR DELIVERING GASES TO A SURFACE
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Patent #:
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Issue Dt:
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08/31/1999
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Application #:
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08976928
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Filing Dt:
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11/24/1997
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Title:
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PROTECTIVE GAS SHIELD FOR CHEMICAL VAPOR DEPOSITION APPARATUS
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Patent #:
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Issue Dt:
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12/15/1998
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Application #:
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09008024
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Filing Dt:
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01/16/1998
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Title:
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FREE FLOATING SHIELD
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Patent #:
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Issue Dt:
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02/22/2000
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Application #:
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09018021
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Filing Dt:
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02/02/1998
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Title:
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WAFER CARRIER AND SEMICONDUCTOR APPARATUS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
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Patent #:
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Issue Dt:
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03/13/2001
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Application #:
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09113823
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Filing Dt:
|
07/10/1998
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Title:
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SINGLE BODY INJECTOR AND DEPOSITION CHAMBER
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|
|
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Patent #:
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Issue Dt:
|
05/02/2000
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Application #:
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09185180
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Filing Dt:
|
11/03/1998
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Title:
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FREE FLOATING SHIELD AND SEMICONDUCTOR PROCESSING SYSTEM
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|
|
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Patent #:
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Issue Dt:
|
03/27/2001
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Application #:
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09480730
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Filing Dt:
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01/06/2000
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Title:
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CHEMICAL VAPOR DEPOSITION SYSTEM AND METHOD
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Patent #:
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Issue Dt:
|
03/05/2002
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Application #:
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09492420
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Filing Dt:
|
01/27/2000
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Title:
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Free floating shield and semiconductor processing system
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|
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Patent #:
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|
Issue Dt:
|
11/07/2000
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Application #:
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09493492
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Filing Dt:
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01/28/2000
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Title:
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Wafer processing reactor having a gas flow control system and method
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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09574826
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Filing Dt:
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05/19/2000
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Title:
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PROTECTIVE GAS SHIELD APPARATUS
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|
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Patent #:
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Issue Dt:
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02/18/2003
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Application #:
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09757542
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Filing Dt:
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01/09/2001
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Publication #:
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Pub Dt:
|
06/28/2001
| | | | |
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Title:
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SINGLE BODY INJECTOR AND DEPOSITION CHAMBER
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Patent #:
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Issue Dt:
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01/25/2005
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Application #:
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09996869
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Filing Dt:
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11/27/2001
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Publication #:
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Pub Dt:
|
03/21/2002
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Title:
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SEMICONDUCTOR WAFER PROCESSING SYSTEM WITH VERTICALLY-STACKED PROCESS CHAMBERS AND SINGLE-AXIS DUAL-WAFER TRANSFER SYSTEM
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Patent #:
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Issue Dt:
|
05/10/2005
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Application #:
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10194639
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Filing Dt:
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07/12/2002
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Publication #:
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Pub Dt:
|
02/27/2003
| | | | |
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Title:
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MODULAR INJECTOR AND EXHAUST ASSEMBLY
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Patent #:
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Issue Dt:
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07/13/2004
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Application #:
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10226773
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Filing Dt:
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08/23/2002
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Publication #:
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Pub Dt:
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05/22/2003
| | | | |
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Title:
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ATMOSPHERIC PRESSURE WAFER PROCESSING REACTOR HAVING AN INTERNAL PRESSURE CONTROL SYSTEM AND METHOD
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Patent #:
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Issue Dt:
|
10/12/2004
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Application #:
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10685062
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Filing Dt:
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10/14/2003
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Publication #:
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Pub Dt:
|
08/12/2004
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Title:
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HEATING SYSTEM, METHOD FOR HEATING A DEPOSITION OR OXIDATION REACTOR, AND REACTOR INCLUDING THE HEATING SYSTEM
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