Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 036628/0514 | |
| Pages: | 7 |
| | Recorded: | 09/23/2015 | | |
| Attorney Dkt #: | 3639-2US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/01/2020
|
Application #:
|
14860078
|
Filing Dt:
|
09/21/2015
|
|
Publication #:
|
|
Pub Dt:
|
12/22/2016
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR DETERMINING FIELD NON-UNIFORMITIES OF A WAFER PROCESSING CHAMBER USING A WAFER PROCESSING PARAMETER
|
|
|
Assignee
|
|
|
|
|
| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
|
|
Correspondence name and address
|
| |
HARNESS, DICKEY & PIERCE, P.L.C.
|
| |
P.O. BOX 828
|
| |
BLOOMFIELD HILLS, MI 48303
|
Search Results as of:
04/26/2024 09:46 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
