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Reel/Frame:036729/0690   Pages: 12
Recorded: 10/05/2015
Attorney Dkt #:15391USAD01/ETCH/D/MER
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
12/15/2015
Application #:
14580184
Filing Dt:
12/22/2014
Publication #:
Pub Dt:
11/05/2015
Title:
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEAT TRANSFER FLUID FLOW
Assignors
1
Exec Dt:
07/15/2011
2
Exec Dt:
06/07/2011
3
Exec Dt:
07/14/2011
4
Exec Dt:
07/25/2011
5
Exec Dt:
07/25/2011
6
Exec Dt:
07/25/2011
7
Exec Dt:
07/26/2011
8
Exec Dt:
07/25/2011
9
Exec Dt:
07/25/2011
10
Exec Dt:
06/28/2011
11
Exec Dt:
08/08/2011
Assignee
1
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
BLAKELY SOKOLOFF TAYLOR & ZAFMAN LLP
1279 OAKMEAD PARKWAY
SUNNYVALE, CA 94085-4040

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