Patent Assignment Details
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| Reel/Frame: | 036961/0184 | |
| Pages: | 2 |
| | Recorded: | 11/04/2015 | | |
| Attorney Dkt #: | LAM2P910 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/19/2017
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Application #:
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14932416
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Filing Dt:
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11/04/2015
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Publication #:
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Pub Dt:
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05/04/2017
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Title:
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METHODS AND SYSTEMS FOR INDEPENDENT CONTROL OF RADICAL DENSITY, ION DENSITY, AND ION ENERGY IN PULSED PLASMA SEMICONDUCTOR DEVICE FABRICATION
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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KENNETH D. WRIGHT
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710 LAKEWAY DRIVE
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SUITE 200
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SUNNYVALE, CA 94085
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