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Reel/Frame:037017/0885   Pages: 2
Recorded: 11/11/2015
Attorney Dkt #:048638-008300
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
12/08/2015
Application #:
13620654
Filing Dt:
09/14/2012
Publication #:
Pub Dt:
01/10/2013
Title:
MULTI-STATION DECOUPLED REACTIVE ION ETCH CHAMBER
Assignor
1
Exec Dt:
11/09/2015
Assignee
1
188 TAIHUA ROAD, JINQIAO EXPORT, PROCESSING ZONE (SOUTH AREA), PUDONG
SHANGHAI, CHINA 201201
Correspondence name and address
NIXON PEABODY LLP
P.O. BOX 60610
PALO ALTO, CA 94306

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