Patent Assignment Details
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| Reel/Frame: | 037092/0990 | |
| Pages: | 6 |
| | Recorded: | 11/19/2015 | | |
| Attorney Dkt #: | APPM/16431USD1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/06/2018
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Application #:
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14939787
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Filing Dt:
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11/12/2015
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Publication #:
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Pub Dt:
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03/03/2016
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Title:
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METHODS AND APPARATUS FOR CONTROLLING PHOTORESIST LINE WIDTH ROUGHNESS WITH ENHANCED ELECTRON SPIN CONTROL
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PATTERSON + SHERIDAN, LLP
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595 SHREWSBURY AVE
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SUITE 100
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SHREWSBURY, NJ 07702
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