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Reel/Frame:037213/0348   Pages: 17
Recorded: 12/04/2015
Attorney Dkt #:3521.333D
Conveyance: MERGER (SEE DOCUMENT FOR DETAILS).
Total properties: 2
1
Patent #:
Issue Dt:
02/14/2017
Application #:
14584034
Filing Dt:
12/29/2014
Publication #:
Pub Dt:
10/01/2015
Title:
METHOD FOR HIGH-VELOCITY AND ATMOSPHERIC-PRESSURE ATOMIC LAYER DEPOSITION WITH SUBSTRATE AND COATING HEAD SEPARATION DISTANCE IN THE MILLIMETER RANGE
2
Patent #:
Issue Dt:
10/10/2017
Application #:
14957273
Filing Dt:
12/02/2015
Publication #:
Pub Dt:
04/28/2016
Title:
Atomic Layer Deposition Head
Assignor
1
Exec Dt:
03/29/2013
Assignee
1
3050 ZANKER ROAD
SAN JOSE, CALIFORNIA 95134
Correspondence name and address
ROBERT HAYDEN
425 SHERMAN AVENUE, SUITE 230
PALO ALTO, CA 94306

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