Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 037614/0090 | |
| Pages: | 2 |
| | Recorded: | 01/28/2016 | | |
| Attorney Dkt #: | 051583-0656 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/08/2017
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Application #:
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14633025
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Filing Dt:
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02/26/2015
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Publication #:
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Pub Dt:
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09/01/2016
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Title:
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FAST METHOD FOR REACTOR AND FEATURE SCALE COUPLING IN ALD AND CVD
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Assignee
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| 5801 SOUTH ELLIS AVENUE |
| CHICAGO, ILLINOIS 60637 |
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Correspondence name and address
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MATTHEW E. MARTIN
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3000 K STREET N.W., SUITE 600
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FOLEY & LARDNER LLP
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WASHINGTON, DC 20007
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