Patent Assignment Details
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| Reel/Frame: | 037634/0801 | |
| Pages: | 7 |
| | Recorded: | 02/01/2016 | | |
| Attorney Dkt #: | HITACHI12-0001199US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/28/2018
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Application #:
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15010333
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Filing Dt:
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01/29/2016
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Publication #:
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Pub Dt:
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08/04/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
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Assignee
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| 14-1, SOTOKANDA 4-CHOME |
| CHIYODA-KU |
| TOKYO, JAPAN 101-8980 |
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Correspondence name and address
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DANIEL N. CALDER
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VOLPE & KOENIG
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30 SOUTH 17TH STREET
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PHILADELPHIA, PA 19103
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