Patent Assignment Details
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| Reel/Frame: | 037813/0136 | |
| Pages: | 3 |
| | Recorded: | 02/24/2016 | | |
| Attorney Dkt #: | 15EL-040 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/11/2018
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Application #:
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15051836
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Filing Dt:
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02/24/2016
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Publication #:
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Pub Dt:
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09/08/2016
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Title:
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SUBSTRATE PROCESSING METHOD INCLUDING SUPPLYING A FLUORINE-CONTAINING GAS ON A SURFACE OF A SUBSTRATE
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Assignee
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| 3-1, AKASAKA 5-CHOME, MINATO-KU, |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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IPUSA, P.L.L.C
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1054 31ST STREET, N.W.
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SUITE 400
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WASHINGTON, DC 20007
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