Patent Assignment Details
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Reel/Frame: | 038146/0416 | |
| Pages: | 11 |
| | Recorded: | 03/31/2016 | | |
Attorney Dkt #: | HITACHI12-0000633US01 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/06/2017
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Application #:
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15084847
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Filing Dt:
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03/30/2016
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Publication #:
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Pub Dt:
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07/21/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND RECORDING MEDIUM
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Assignee
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14-1, SOTOKANDA 4-CHOME |
CHIYODA-KU |
TOKYO, JAPAN |
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Correspondence name and address
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GERALD B. HALT, JR.
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VOLPE & KOENIG
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30 SOUTH 17TH STREET
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PHILADELPHIA, PA 19103
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