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Reel/Frame:038170/0900   Pages: 6
Recorded: 04/01/2016
Attorney Dkt #:1019952-000399
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
08/28/2018
Application #:
15062692
Filing Dt:
03/07/2016
Publication #:
Pub Dt:
06/30/2016
Title:
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING ION BEAM
Assignors
1
Exec Dt:
03/15/2016
2
Exec Dt:
03/17/2016
3
Exec Dt:
03/11/2016
Assignee
1
2-5-1, KURIGI, ASAO-KU
KAWASAKI-SHI
KANAGAWA-KEN, JAPAN
Correspondence name and address
BUCHANAN INGERSOLL & ROONEY
1737 KING STREET
ALEXANDRIA, VA 22314

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