Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 038540/0907 | |
| Pages: | 4 |
| | Recorded: | 05/10/2016 | | |
| Attorney Dkt #: | 023027USA/ETCH/CHMBR/MDD |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/24/2017
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Application #:
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15146133
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Filing Dt:
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05/04/2016
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Publication #:
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Pub Dt:
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05/04/2017
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Title:
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LOW ELECTRON TEMPERATURE ETCH CHAMBER WITH INDEPENDENT CONTROL OVER PLASMA DENSITY, RADICAL COMPOSITION AND ION ENERGY FOR ATOMIC PRECISION ETCHING
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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ROBERT M. WALLACE
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2112 EASTMAN AVENUE, SUITE 102
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VENTURA, CA 93003
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