Patent Assignment Details
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| Reel/Frame: | 038923/0222 | |
| Pages: | 5 |
| | Recorded: | 06/15/2016 | | |
| Attorney Dkt #: | 80042-20574USAC01-1012578 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/24/2019
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Application #:
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15173824
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Filing Dt:
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06/06/2016
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Publication #:
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Pub Dt:
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09/29/2016
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Title:
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ENHANCED ETCHING PROCESSES USING REMOTE PLASMA SOURCES
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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KILPATRICK TOWNSEND & STOCKTON LLP / AMA
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1100 PEACHTREE STREET
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SUITE 2800
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ATLANTA, GA 30309
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