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Reel/Frame:039163/0447   Pages: 5
Recorded: 07/15/2016
Attorney Dkt #:ZIMR/0363USP/NHOUSTON
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
01/08/2019
Application #:
15024001
Filing Dt:
03/22/2016
Publication #:
Pub Dt:
08/25/2016
Title:
METHOD FOR CONTROLLING A GAS SUPPLY TO A PROCESS CHAMBER, CONTROLLER FOR CONTROLLING A GAS SUPPLY TO A PROCESS CHAMBER, AND APPARATUS
Assignors
1
Exec Dt:
01/15/2014
2
Exec Dt:
01/15/2014
3
Exec Dt:
01/16/2014
4
Exec Dt:
01/15/2014
Assignee
1
SIEMENSSTRASSE 100
ALZENAU, GERMANY 63755
Correspondence name and address
PATTERSON & SHERIDAN, LLP
24 GREENWAY PLAZA, SUITE 1600
HOUSTON, TX 77046

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