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Reel/Frame:039199/0031   Pages: 6
Recorded: 07/20/2016
Attorney Dkt #:HITACHI13-21210016US03
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
12/05/2017
Application #:
15202168
Filing Dt:
07/05/2016
Publication #:
Pub Dt:
10/27/2016
Title:
METHOD OF MANUFACTURING A SIOCN FILM, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
Assignors
1
Exec Dt:
09/18/2013
2
Exec Dt:
09/18/2013
Assignee
1
14-1, SOTOKANDA 4-CHOME
CHIYODA-KU
TOKYO, JAPAN 101-8980
Correspondence name and address
VOLPE AND KOENIG, P.C.
30 S. 17TH STREET
UNITED PLAZA
PHILADELPHIA, PA 19103

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