Patent Assignment Details
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| Reel/Frame: | 039308/0077 | |
| Pages: | 3 |
| | Recorded: | 08/01/2016 | | |
| Attorney Dkt #: | 56436.09400 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/17/2017
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Application #:
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15210256
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Filing Dt:
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07/14/2016
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Title:
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METHOD OF CYCLIC DRY ETCHING USING ETCHANT FILM
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Assignee
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| FURO-CHO, CHIKUSA-KU |
| NAGOYA, JAPAN 464-8601 |
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Correspondence name and address
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SNELL & WILMER L.L.P. (ASM JAPAN)
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ONE ARIZONA CENTER
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400 EAST VAN BUREN STREET
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PHOENIX, AZ 85004-2202
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