Patent Assignment Details
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| Reel/Frame: | 039318/0358 | |
| Pages: | 3 |
| | Recorded: | 08/02/2016 | | |
| Attorney Dkt #: | 4887.P1211 (023988) |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/05/2023
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Application #:
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15217513
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Filing Dt:
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07/22/2016
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Publication #:
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Pub Dt:
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11/09/2017
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Title:
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ADVANCED TEMPERATURE CONTROL FOR WAFER CARRIER IN PLASMA PROCESSING CHAMBER
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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BLAKELY SOKOLOFF TAYLOR & ZAFMAN LLP
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1279 OAKMEAD PARKWAY
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SUNNYVALE, CA 94085-4040
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