Patent Assignment Details
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| Reel/Frame: | 039483/0131 | |
| Pages: | 4 |
| | Recorded: | 08/19/2016 | | |
| Attorney Dkt #: | 4011-1US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/10/2019
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Application #:
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15241393
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Filing Dt:
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08/19/2016
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Publication #:
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Pub Dt:
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02/22/2018
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Title:
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CONTROL OF ON-WAFER CD UNIFORMITY WITH MOVABLE EDGE RING AND GAS INJECTION ADJUSTMENT
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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HARNESS, DICKEY & PIERCE, P.L.C.
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P.O. BOX 828
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BLOOMFIELD HILLS, MI 48303
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