Patent Assignment Details
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Reel/Frame: | 039615/0686 | |
| Pages: | 3 |
| | Recorded: | 09/01/2016 | | |
Attorney Dkt #: | HT16-004 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/30/2018
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Application #:
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15189296
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Filing Dt:
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06/22/2016
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Publication #:
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Pub Dt:
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12/28/2017
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Title:
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New Surface Treatment Method for Dielectric Anti-Reflective Coating (DARC) to Shrink Photoresist Critical Dimension (CD)
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Assignee
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678 SOUTH HILLVIEW DRIVE |
MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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SAILE ACKERMAN LLC
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28 DAVIS AVENUE
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POUGHKEEPSIE, NY 12603
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