Patent Assignment Details
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Reel/Frame: | 039620/0238 | |
| Pages: | 3 |
| | Recorded: | 09/02/2016 | | |
Attorney Dkt #: | 078697.00035 (P4791) |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/02/2018
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Application #:
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15255255
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Filing Dt:
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09/02/2016
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Publication #:
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Pub Dt:
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03/09/2017
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Title:
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METHOD OF IMPROVING LATERAL RESOLUTION FOR HEIGHT SENSOR USING DIFFERENTIAL DETECTION TECHNOLOGY FOR SEMICONDUCTOR INSPECTION AND METROLOGY
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Assignee
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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KLA-TENCOR CORPORATION / HODGSON RUSS LL
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THE GUARANTY BUILDING
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140 PEARL STREET, SUITE 100
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BUFFALO, NY 14202-4040
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