Patent Assignment Details
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Reel/Frame: | 039742/0525 | |
| Pages: | 4 |
| | Recorded: | 09/14/2016 | | |
Attorney Dkt #: | KLA-080 (P4848) |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/16/2019
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Application #:
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15230336
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Filing Dt:
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08/05/2016
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Publication #:
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Pub Dt:
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06/15/2017
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Title:
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X-Ray Scatterometry Metrology For High Aspect Ratio Structures
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Assignee
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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JOSEPH S SPANO
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851 BURLWAY ROAD, SUITE 407
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BURLINGAME, CA 94010
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05/14/2024 01:49 AM
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