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Patent #:
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Issue Dt:
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01/20/1998
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Application #:
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08744013
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Filing Dt:
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11/05/1996
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Title:
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BASIC STRIPPING AND CLEANING COMPOSITION
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Patent #:
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Issue Dt:
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12/16/1997
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Application #:
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08745754
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Filing Dt:
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11/08/1996
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Title:
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STRIPPING AND CLEANING COMPOSITION
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Patent #:
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Issue Dt:
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03/02/1999
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Application #:
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08789229
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Filing Dt:
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01/24/1997
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Title:
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POLISH PROCESS AND SLURRY FOR PLANARIZATION
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Patent #:
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Issue Dt:
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04/06/1999
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Application #:
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08911076
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Filing Dt:
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08/14/1997
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Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITION
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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08939635
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Filing Dt:
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09/29/1997
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Title:
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THERMALLY STABLE AMINOSULFUR TRIFLUORIDES
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Patent #:
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Issue Dt:
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06/27/2000
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Application #:
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08939940
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Filing Dt:
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09/29/1997
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Title:
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FLUORINATION WITH AMINOSULFUR TRIFLUORIDES
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Patent #:
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Issue Dt:
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09/21/1999
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Application #:
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08941530
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Filing Dt:
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09/30/1997
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Title:
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METHOD AND APPARATUS FOR MAKING ULTRA-PURE HYDROGEN
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Patent #:
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Issue Dt:
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02/23/1999
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Application #:
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08942996
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Filing Dt:
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10/02/1997
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Title:
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SILICON NITRIDE FROM BIS(TERTIARYBUTYLAMINO)SILANE
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Patent #:
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Issue Dt:
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10/12/1999
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Application #:
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08944907
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Filing Dt:
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10/06/1997
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Title:
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SOLVENT PURGE MECHANISM
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Patent #:
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Issue Dt:
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09/28/1999
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Application #:
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08964783
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Filing Dt:
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11/05/1997
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Title:
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METHOD FOR REMOVAL OF MOISTURE FROM GASEOUS HCL
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Patent #:
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Issue Dt:
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12/07/1999
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Application #:
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09004937
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Filing Dt:
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01/09/1998
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Title:
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AQUEOUS STRIPPING AND CLEANING COMPOSITIONS
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Patent #:
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Issue Dt:
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09/12/2000
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Application #:
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09043505
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Filing Dt:
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03/23/1998
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Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS
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Patent #:
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Issue Dt:
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11/02/1999
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Application #:
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09095818
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Filing Dt:
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06/11/1998
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Title:
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DEPOSITION OF SILICON DIOXIDE AND SILICONE OXYNITRIDE USING BIS (TERTIARYBUTYLAMINO) SILANE
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Patent #:
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Issue Dt:
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04/17/2001
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Application #:
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09174196
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Filing Dt:
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10/16/1998
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Title:
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DYNAMIC BLENDING GAS DELIVERY SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09226996
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Filing Dt:
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01/07/1999
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Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS
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Patent #:
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Issue Dt:
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06/19/2001
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Application #:
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09227702
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Filing Dt:
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01/08/1999
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Title:
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METHOD OF CLEAN A WAFER CARRIER
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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09238851
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Filing Dt:
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01/27/1999
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Publication #:
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Pub Dt:
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08/07/2003
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Title:
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LOW SURFACE TENSION, LOW VISCOSITY, AQUEOUS, ACIDIC COMPOSITIONS CONTAINING FLUORIDE AND ORGANIC, POLAR SOLVENTS FOR REMOVAL OF PHOTORESIST AND ORGANIC AND INORGANIC ETCH RESIDUES AT ROOM TEMPERATURE
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Patent #:
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Issue Dt:
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10/31/2000
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Application #:
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09318003
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Filing Dt:
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05/25/1999
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Title:
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SOLVENT PURGE MECHANISM
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Patent #:
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Issue Dt:
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06/26/2001
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Application #:
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09321036
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Filing Dt:
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05/27/1999
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Title:
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SLURRY COMPOSITION AND METHOD OF CHEMICAL MECHANICAL POLISHING USING SAME
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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09417668
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Filing Dt:
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10/14/1999
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Title:
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VACUUM PREPARATION OF HYDROGEN HALIDLE DRIER
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Patent #:
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Issue Dt:
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07/24/2001
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Application #:
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09418084
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Filing Dt:
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10/14/1999
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Title:
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CHEMICAL DELIVERY SYSTEM WITH ULTRASONIC FLUID SENSORS
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Patent #:
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Issue Dt:
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08/01/2000
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Application #:
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09432724
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Filing Dt:
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11/01/1999
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Title:
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PROCESS FOR THE SYNTHESIS OF DIALKYL, DIARYL, AND ARYLALKYL AMINOSULFUR TRIFLUORIDES
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09432980
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Filing Dt:
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11/03/1999
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Title:
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PROCESSES FOR IMPROVED SURFACE PROPERTIES INCORPORATING COMPRESSIVE HEATING OF REACTIVE GASES
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09481050
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Filing Dt:
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01/11/2000
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Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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09483751
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Filing Dt:
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01/14/2000
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Title:
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FLUORINATION WITH AMINOSULFUR TRIFLUORIDES
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09535682
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Filing Dt:
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03/23/2000
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Title:
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Thermally stable aminosulfur trifluorides
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Patent #:
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Issue Dt:
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08/07/2001
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Application #:
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09535756
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Filing Dt:
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03/27/2000
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Title:
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Process for generating useful electrophiles from common anions and their application in electrophilic rections with organic substrates
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Patent #:
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Issue Dt:
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08/21/2001
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Application #:
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09566075
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Filing Dt:
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05/08/2000
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Title:
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Purification of nitrogen trifluoride by continuous cryogenic distillation
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Patent #:
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Issue Dt:
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11/15/2005
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09577347
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Filing Dt:
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05/24/2000
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Title:
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SELECTIVE POLISHING WITH SLURRIES CONTAINING POLYELECTROLYTES
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Patent #:
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Issue Dt:
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08/21/2001
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09661750
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09/14/2000
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Title:
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Chemical delivery system with spill containment door
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Patent #:
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01/04/2005
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09675376
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09/29/2000
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Title:
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MULTIPLE CONTENTS CONTAINER ASSEMBLY FOR ULTRAPURE SOLVENT PURGING
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Patent #:
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Issue Dt:
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02/25/2003
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Application #:
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09783900
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Filing Dt:
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02/15/2001
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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ACTIVE FLUORIDE CATALYSTS FOR FLUORINATION REACTIONS
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Patent #:
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02/04/2003
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09799644
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03/06/2001
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07/26/2001
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Title:
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DYNAMIC BLENDING GAS DELIVERY SYSTEM AND METHOD
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Patent #:
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03/04/2003
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Application #:
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09876243
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06/07/2001
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Publication #:
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Pub Dt:
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12/12/2002
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Title:
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HIGH PURITY CHEMICAL CONTAINER WITH EXTERNAL LEVEL SENSOR AND LIQUID SUMP
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Patent #:
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Issue Dt:
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08/09/2005
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09884450
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06/18/2001
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04/25/2002
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Title:
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WAFER CONTAINER WASHING APPARATUS
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09/30/2003
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09893968
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06/29/2001
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Pub Dt:
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05/22/2003
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Title:
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PROCESS FOR REMOVING CONTAMINANT FROM A SURFACE AND COMPOSITION USEFUL THEREFOR
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08/13/2002
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09938883
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08/24/2001
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Title:
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SOLVENTLESS PURGEABLE DIAPHRAGM VALVED MANIFOLD FOR LOW VAPOR PRESSURE CHEMICALS
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06/24/2003
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09944042
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08/31/2001
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10/03/2002
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Title:
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ORGANOSILICON PRECURSORS FOR INTERLAYER DIELECTRIC FILMS WITH LOW DIELECTRIC CONSTANTS
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09/09/2003
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09966195
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09/28/2001
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04/03/2003
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Title:
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SYSTEMS AND METHODS FOR CONDITIONING ULTRA HIGH PURITY GAS BULK CONTAINERS
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09/02/2003
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09966197
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09/28/2001
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04/03/2003
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Title:
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HIGH FLOW RATE TRANSPORTABLE UHP GAS SUPPLY SYSTEM
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02/22/2005
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10029892
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12/21/2001
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08/07/2003
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Title:
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STABILIZERS TO INHIBIT THE POLYMERIZATION OF SUBSTITUTED CYCLOTETRASILOXANE
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09/13/2005
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10042612
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01/09/2002
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07/10/2003
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AQUEOUS STRIPPING AND CLEANING COMPOSITION
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10/11/2005
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10046614
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01/14/2002
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07/17/2003
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CABINET FOR CHEMICAL DELIVERY WITH SOLVENT PURGING
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04/08/2003
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10050352
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01/16/2002
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Title:
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PURIFICATION OF HEXAFLUORO-1,3-BUTADIENE
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08/03/2004
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10052052
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01/17/2002
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07/17/2003
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Title:
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PURIFICATION OF GROUP IVB METAL HALIDES
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04/28/2009
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10057206
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01/25/2002
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10/16/2003
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Compositions of chemical mechanical planarization slurries contacting noble-metal-featured substrates
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10/28/2003
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10101339
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03/19/2002
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09/25/2003
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PRODUCT DELIVERY SYSTEM FOR STATIONARY OR PORTABLE BULK CONTAINERS
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11/25/2003
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10101340
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03/19/2002
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09/25/2003
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TRANSPORTATION AND STORAGE OF ULTRA-HIGH PURITY PRODUCTS
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01/25/2005
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10150798
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05/17/2002
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10/23/2003
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Title:
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POROGENS, POROGENATED PRECURSORS AND METHODS FOR USING THE SAME TO PROVIDE POROUS ORGANOSILICA GLASS FILMS WITH LOW DIELECTRIC CONSTANTS
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11/18/2003
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10155726
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05/23/2002
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PURGEABLE MANIFOLD FOR LOW VAPOR PRESSURE CHEMICALS CONTAINERS
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12/11/2007
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10158511
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05/30/2002
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12/04/2003
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LOW DIELECTRIC MATERIALS AND METHODS FOR MAKING SAME
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04/22/2003
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10179818
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06/24/2002
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PREPARATION OF METAL IMINO/AMINO COMPLEXES FOR METAL OXIDE AND METAL NITRIDE THIN FILMS
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01/13/2004
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10191060
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07/10/2002
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COMPOSITONS FOR REMOVING ETCHING RESIDUE AND USE THEREOF
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11/04/2008
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10191719
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07/09/2002
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01/15/2004
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05/24/2005
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10219164
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08/13/2002
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01/09/2003
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03/23/2004
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10278131
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10/22/2002
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05/15/2007
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10282924
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10/29/2002
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06/05/2003
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WAFER CONTAINER WASHING APPARATUS
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07/29/2008
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11/14/2002
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05/20/2004
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NON-THERMAL PROCESS FOR FORMING POROUS LOW DIELECTRIC CONSTANT FILMS
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12/07/2004
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10333643
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03/12/2003
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10/02/2003
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CERIUM OXIDE SLURRY, AND METHOD OF MANUFACTURING SUBSTRATE
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11/08/2005
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10342930
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01/15/2003
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07/15/2004
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PROCESS FOR THE PRODUCTION AND PURIFICATION OF BIS(TERTIARY-BUTYLAMINO)SILANE
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02/21/2006
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10353211
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01/28/2003
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07/29/2004
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PROCESS FOR PURIFYING FLUOROXY COMPOUNDS
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05/17/2005
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10357897
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02/03/2003
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08/07/2003
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04/18/2006
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10361822
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02/11/2003
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01/15/2004
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Title:
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CATALYST ATTACHED TO SOLID AND USED TO PROMOTE FREE RADICAL FORMATION IN CMP FORMULATIONS
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Patent #:
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Issue Dt:
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08/29/2006
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Application #:
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10379466
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Filing Dt:
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03/04/2003
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Publication #:
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Pub Dt:
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09/09/2004
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Title:
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MECHANICAL ENHANCEMENT OF DENSE AND POROUS ORGANOSILICATE MATERIALS BY UV EXPOSURE
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Patent #:
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Issue Dt:
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10/02/2007
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Application #:
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10401405
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Filing Dt:
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03/27/2003
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Publication #:
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Pub Dt:
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09/18/2003
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Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS
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Patent #:
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Issue Dt:
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06/10/2008
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Application #:
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10409468
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Filing Dt:
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04/07/2003
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Publication #:
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Pub Dt:
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12/18/2003
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Title:
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POROGENS, POROGENATED PRECURSORS AND METHODS FOR USING THE SAME TO PROVIDE POROUS ORGANOSILICA GLASS FILMS WITH LOW DIELECTRIC CONSTANTS
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Patent #:
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Issue Dt:
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10/04/2005
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Application #:
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10443867
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Filing Dt:
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05/23/2003
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Publication #:
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Pub Dt:
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11/25/2004
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Title:
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COMPOSITIONS SUITABLE FOR REMOVING PHOTORESIST, PHOTORESIST BYPRODUCTS AND ETCHING RESIDUE, AND USE THEREOF
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Patent #:
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Issue Dt:
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06/28/2011
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Application #:
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10568077
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Filing Dt:
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08/03/2007
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Publication #:
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Pub Dt:
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02/14/2008
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Title:
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PERIODIC ACID COMPOSITIONS FOR POLISHING RUTHENIUM/LOW K SUBSTRATES
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Patent #:
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Issue Dt:
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09/05/2006
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Application #:
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10602279
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Filing Dt:
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06/23/2003
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Publication #:
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Pub Dt:
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03/18/2004
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Title:
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STABILIZERS TO INHIBIT THE POLYMERIZATION OF SUBSTITUTED CYCLOTETRASILOXANE
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Patent #:
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Issue Dt:
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10/24/2006
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Application #:
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10602329
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Filing Dt:
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06/24/2003
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Publication #:
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Pub Dt:
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12/30/2004
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Title:
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HIGH PURITY CHEMICAL CONTAINER WITH DIPTUBE AND LEVEL SENSOR TERMINATING IN LOWEST MOST POINT OF CONCAVE FLOOR
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Patent #:
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Issue Dt:
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11/09/2004
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Application #:
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10607897
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Filing Dt:
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06/27/2003
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Publication #:
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Pub Dt:
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03/11/2004
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Title:
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SYSTEMS AND METHODS FOR CONDITIONING ULTRA HIGH PURITY GAS BULK CONTAINERS
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Patent #:
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Issue Dt:
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03/21/2006
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Application #:
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10619708
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Filing Dt:
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07/14/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Title:
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CATALYTIC COMPOSITION FOR CHEMICAL-MECHANICAL POLISHING, METHOD OF USING SAME, AND SUBSTRATE TREATED WITH SAME
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Patent #:
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Issue Dt:
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05/02/2006
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Application #:
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10619901
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Filing Dt:
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07/14/2003
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Publication #:
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Pub Dt:
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01/20/2005
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Title:
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COMPOSITION FOR CHEMICAL-MECHANICAL POLISHING AND METHOD OF USING SAME
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Patent #:
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Issue Dt:
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01/11/2005
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Application #:
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10621766
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Filing Dt:
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07/17/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Title:
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MULTIPLE CONTENTS CONTAINER ASSEMBLY FOR ULTRAPURE SOLVENT PURGING
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Patent #:
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Issue Dt:
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12/30/2008
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Application #:
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10624356
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Filing Dt:
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07/21/2003
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Publication #:
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Pub Dt:
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05/20/2004
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Title:
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NON-THERMAL PROCESS FOR FORMING POROUS LOW DIELECTRIC CONSTANT FILMS
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Patent #:
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Issue Dt:
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12/23/2008
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Application #:
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10624357
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Filing Dt:
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07/21/2003
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Publication #:
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Pub Dt:
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09/09/2004
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Title:
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MECHANICAL ENHANCEMENT OF DENSE AND POROUS ORGANOSILICATE MATERIALS BY UV EXPOSURE
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Patent #:
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Issue Dt:
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04/28/2009
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Application #:
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10652308
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09/02/2003
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Publication #:
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Pub Dt:
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02/26/2004
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Title:
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PROCESS FOR REMOVING CONTAMINANT FROM A SURFACE AND COMPOSITION USEFUL THEREFOR
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Patent #:
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Issue Dt:
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10/31/2006
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Application #:
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10665739
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Filing Dt:
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09/18/2003
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Publication #:
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Pub Dt:
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07/01/2004
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Title:
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ADDITIVES TO PREVENT DEGRADATION OF ALKYL-HYDROGEN SILOXANES
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Patent #:
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Issue Dt:
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11/22/2005
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Application #:
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10669942
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Filing Dt:
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09/24/2003
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Publication #:
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Pub Dt:
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03/10/2005
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Title:
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PURGEABLE CONTAINER FOR LOW VAPOR PRESSURE CHEMICALS
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Patent #:
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Issue Dt:
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11/30/2004
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Application #:
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10673347
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Filing Dt:
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09/30/2003
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Publication #:
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Pub Dt:
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04/01/2004
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Title:
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SELECTIVE POLISHING WITH SLURRIES CONTAINING POLYELECTROLYTES
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Patent #:
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Issue Dt:
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09/06/2005
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Application #:
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10680267
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Filing Dt:
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10/06/2003
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Publication #:
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Pub Dt:
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04/08/2004
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Title:
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MONITORING OF ULTRA-HIGH PURITY PRODUCT STORAGE TANKS DURING TRANSPORTATION
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Patent #:
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Issue Dt:
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12/26/2006
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Application #:
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10683232
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Filing Dt:
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10/10/2003
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Publication #:
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Pub Dt:
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04/14/2005
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Title:
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TUNABLE COMPOSITION AND METHOD FOR CHEMICAL-MECHANICAL PLANARIZATION WITH ASPARTIC ACID/TOLYLTRIAZOLE
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Issue Dt:
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04/04/2006
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10683258
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10/10/2003
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Pub Dt:
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04/14/2005
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Title:
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CHEMICAL-MECHANICAL PLANARIZATION COMPOSITION WITH NITROGEN CONTAINING POLYMER AND METHOD FOR USE
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Issue Dt:
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03/11/2008
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10715916
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11/18/2003
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Pub Dt:
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05/19/2005
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Title:
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AQUEOUS POLYURETHANE DISPERSION AND METHOD FOR MAKING AND USING SAME
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Issue Dt:
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11/23/2004
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10723737
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11/26/2003
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Pub Dt:
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09/02/2004
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Title:
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COMPOSITIONS FOR REMOVING ETCHING RESIDUE AND USE THEREOF
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05/17/2005
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10730505
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12/08/2003
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Pub Dt:
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06/09/2005
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Title:
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PROCESS FOR REMOVING WATER FROM AMMONIA
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07/11/2006
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10763365
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01/23/2004
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07/28/2005
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Title:
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PROCESS FOR THE PURIFICATION OF NF3
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04/18/2006
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10763366
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01/23/2004
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Pub Dt:
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07/28/2005
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Title:
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PROCESS FOR PRODUCING 1,1-DIFLUOROVINYL CYCLOALIPHATIC COMPOUNDS
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08/08/2006
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10788223
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02/26/2004
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09/01/2005
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Title:
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PROCESS FOR PURIFICATION OF GERMANE
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07/11/2006
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10862851
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06/07/2004
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12/29/2005
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BURNER AND PROCESS FOR COMBUSTION OF A GAS CAPABLE OF REACTING TO FORM SOLID PRODUCTS
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10/05/2010
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10877305
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06/25/2004
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12/30/2004
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AQUEOUS BUFFERED FLUORIDE-CONTAINING ETCH RESIDUE REMOVERS AND CLEANERS
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12/22/2015
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10896589
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07/22/2004
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01/26/2006
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Composition for removing photoresist and/or etching residue from a substrate and use thereof
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08/28/2007
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10902778
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08/02/2004
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02/24/2005
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07/24/2007
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10914113
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08/09/2004
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03/03/2005
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07/05/2005
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10942218
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09/15/2004
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02/10/2005
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MULTIPLE CONTENTS CONTAINER ASSEMBLY FOR ULTRAPURE SOLVENT PURGING
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07/29/2008
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10948277
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09/23/2004
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03/23/2006
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IONIC LIQUID BASED MIXTURES FOR GAS STORAGE AND DELIVERY
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03/06/2007
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10964499
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10/13/2004
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06/02/2005
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LOW DIELECTRIC MATERIALS AND METHODS FOR MAKING SAME
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10/16/2007
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10966803
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10/15/2004
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04/20/2006
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LIQUID MEDIA CONTAINING LEWIS BASIC REACTIVE COMPOUNDS FOR STORAGE AND DELIVERY OF LEWIS ACIDIC GASES
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06/01/2010
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10984108
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11/09/2004
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05/11/2006
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SELECTIVE PURIFICATION OF MONO-TERPENES FOR REMOVAL OF OXYGEN CONTAINING SPECIES
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10/23/2007
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10996743
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11/24/2004
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05/25/2006
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Title:
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XENON RECOVERY SYSTEM
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