Patent Assignment Details
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| Reel/Frame: | 040542/0278 | |
| Pages: | 4 |
| | Recorded: | 11/01/2016 | | |
| Attorney Dkt #: | 56436.09700 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/08/2019
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Application #:
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15340512
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Filing Dt:
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11/01/2016
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Publication #:
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Pub Dt:
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05/03/2018
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Title:
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METHOD OF SUBATMOSPHERIC PLASMA-ENHANCED ALD USING CAPACITIVELY COUPLED ELECTRODES WITH NARROW GAP
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Assignee
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS 1322 AP |
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Correspondence name and address
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SNELL & WILMER L.L.P. (ASM JAPAN)
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ONE ARIZONA CENTER
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400 EAST VAN BUREN STREET
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PHOENIX, AZ 85004-2202
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