Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 040994/0868 | |
| Pages: | 6 |
| | Recorded: | 01/17/2017 | | |
| Attorney Dkt #: | LAM2P967 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/26/2019
|
Application #:
|
15408326
|
Filing Dt:
|
01/17/2017
|
|
Publication #:
|
|
Pub Dt:
|
07/19/2018
| | | | |
|
Title:
|
Near-Substrate Supplemental Plasma Density Generation with Low Bias Voltage within Inductively Coupled Plasma Processing Chamber
|
|
|
Assignee
|
|
|
|
|
| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
|
|
Correspondence name and address
|
| |
KENNETH D. WRIGHT
|
| |
710 LAKEWAY DRIVE
|
| |
SUITE 200
|
| |
SUNNYVALE, CA 94085
|
Search Results as of:
05/03/2024 12:49 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
