Patent Assignment Details
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Reel/Frame: | 041170/0314 | |
| Pages: | 5 |
| | Recorded: | 02/03/2017 | | |
Attorney Dkt #: | PA1322US |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/05/2017
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Application #:
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15363570
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Filing Dt:
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11/29/2016
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Title:
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EUV LPP SOURCE WITH IMPROVED DOSE CONTROL BY COMBINING PULSE MODULATION AND PULSE CONTROL MODE
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Assignee
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P.O. BOX 324 |
VELDHOVEN, NETHERLANDS 5500 |
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Correspondence name and address
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GARD & KASLOW LLP (CYMER)
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4 MAIN STREET , SUITE 20
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LOS ALTOS, CA 94022
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