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Reel/Frame:041253/0226   Pages: 10
Recorded: 02/14/2017
Attorney Dkt #:HITACHI13-0001693US0
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/01/2021
Application #:
15432112
Filing Dt:
02/14/2017
Publication #:
Pub Dt:
08/17/2017
Title:
SUBSTRATE PROCESSING APPARATUS AND PRECURSOR GAS NOZZLE
Assignors
1
Exec Dt:
02/03/2017
2
Exec Dt:
02/06/2017
3
Exec Dt:
02/08/2017
4
Exec Dt:
02/03/2017
5
Exec Dt:
02/06/2017
6
Exec Dt:
02/03/2017
Assignee
1
15-12, NISHI-SHIMBASHI 2-CHOME
MINATO-KU
TOKYO, JAPAN 105-8039
Correspondence name and address
VOLPE AND KOENIG, P.C.
UNITED PLAZA
30 SOUTH 17TH STREET, 18TH FLOOR
PHILADELPHIA, PA 19103

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