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Reel/Frame:041267/0282   Pages: 3
Recorded: 02/15/2017
Attorney Dkt #:LAM2P971
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
02/16/2021
Application #:
15433943
Filing Dt:
02/15/2017
Publication #:
Pub Dt:
08/16/2018
Title:
Methods for Controlling Clamping of Insulator-Type Substrate on Electrostatic-Type Substrate Support Structure
Assignors
1
Exec Dt:
02/14/2017
2
Exec Dt:
02/13/2017
3
Exec Dt:
02/15/2017
4
Exec Dt:
02/13/2017
Assignee
1
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondence name and address
KENNETH D. WRIGHT
710 LAKEWAY DRIVE
SUITE 200
SUNNYVALE, CA 94085

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