Patent Assignment Details
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| Reel/Frame: | 041545/0059 | |
| Pages: | 10 |
| | Recorded: | 03/10/2017 | | |
| Attorney Dkt #: | HITACHI13-0001245US02 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/30/2018
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Application #:
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15453731
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Filing Dt:
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03/08/2017
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Publication #:
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Pub Dt:
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06/22/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Assignee
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| 14-1, SOTOKANDA 4-CHOME, |
| CHIYODA-KU |
| TOKYO, JAPAN 101-8980 |
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Correspondence name and address
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VOLPE AND KOENIG, P.C.
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30 S. 17TH STREET
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SUITE 1800
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PHILADELPHIA, PA 19103
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