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Reel/Frame:041594/0919   Pages: 3
Recorded: 03/16/2017
Attorney Dkt #:TEL-16069US/215095
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/23/2020
Application #:
15460559
Filing Dt:
03/16/2017
Publication #:
Pub Dt:
09/21/2017
Title:
CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND PROGRAM
Assignors
1
Exec Dt:
03/14/2017
2
Exec Dt:
03/14/2017
3
Exec Dt:
03/15/2017
Assignee
1
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO 107-6325, JAPAN
Correspondence name and address
ABELMAN, FRAYNE & SCHWAB/LEE
666 THIRD AVENUE
10TH FLOOR
NEW YORK, NY 10017-5621

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