Patent Assignment Details
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| Reel/Frame: | 041602/0468 | |
| Pages: | 6 |
| | Recorded: | 03/16/2017 | | |
| Attorney Dkt #: | 4124-1US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/16/2019
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Application #:
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15461417
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Filing Dt:
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03/16/2017
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Publication #:
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Pub Dt:
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09/20/2018
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Title:
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SYSTEMS AND METHODS FOR FLOW MONITORING IN A PRECURSOR VAPOR SUPPLY SYSTEM OF A SUBSTRATE PROCESSING SYSTEM
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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HARNESS DICKEY & PIERCE, P.L.C.
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P.O. BOX 828
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BLOOMFIELD HILLS, MI 48303
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