Patent Assignment Details
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| Reel/Frame: | 041845/0820 | |
| Pages: | 6 |
| | Recorded: | 03/01/2017 | | |
| Attorney Dkt #: | MEMSC-007XX |
| Conveyance: | CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE STATE OF INCORPORATION INSIDE THE ASSIGNMENT PREVIOUSLY RECORDED AT REEL: 011713 FRAME: 0352. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/30/2004
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Application #:
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09833973
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Filing Dt:
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04/12/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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METHOD OF ETCHING A DEEP TRENCH IN A SUBSTRATE AND METHOD OF FABRICATING ON-CHIP DEVICES AND MICRO-MACHINED STRUCTURES USING THE SAME
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Assignee
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| ONE TECHNOLOGY DRIVE |
| SUITE 325 |
| ANDOVER, MASSACHUSETTS 01810 |
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Correspondence name and address
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PRETI FLAHERTY BELIVEAU & PACHIOS LLP
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60 STATE STREET
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BOSTON, MA 02109
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