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NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	041904/0158			Pages:	11
		Recorded:	03/07/2017
Conveyance:	SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 88

Patent #:	6045716	Issue Dt:	04/04/2000	Application #:	08892795	Filing Dt:	07/15/1997
Title:	CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD

Patent #:	6337133	Issue Dt:	01/08/2002	Application #:	08914171	Filing Dt:	08/19/1997
Title:	WATER-REPELLENT GLASS PANE AND METHOD FOR PRODUCING SAME

Patent #:	5964646	Issue Dt:	10/12/1999	Application #:	08971642	Filing Dt:	11/17/1997
Title:	GRINDING PROCESS AND APPARATUS FOR PLANARIZING SAWED WAFERS

Patent #:	6254155	Issue Dt:	07/03/2001	Application #:	09228113	Filing Dt:	01/11/1999
Title:	APPARATUS AND METHOD FOR RELIABLY RELEASING WET, THIN WAFERS

Patent #:	6183341	Issue Dt:	02/06/2001	Application #:	09248167	Filing Dt:	02/09/1999
Title:	SLURRY PUMP CONTROL SYSTEM

Patent #:	6495463	Issue Dt:	12/17/2002	Application #:	09407472	Filing Dt:	09/28/1999
Publication #:	US20020068450	Pub Dt:	06/06/2002
Title:	METHOD FOR CHEMICAL MECHANICAL POLISHING

Patent #:	6361647	Issue Dt:	03/26/2002	Application #:	09432144	Filing Dt:	11/02/1999
Title:	METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING

Patent #:	6227956	Issue Dt:	05/08/2001	Application #:	09432882	Filing Dt:	11/02/1999
Title:	PAD QUICK RELEASE DEVICE FOR CHEMICAL MECHANICAL POLISHING

Patent #:	6485354	Issue Dt:	11/26/2002	Application #:	09590470	Filing Dt:	06/09/2000
Title:	Polishing pad with built-in optical sensor

Patent #:	6464574	Issue Dt:	10/15/2002	Application #:	09693040	Filing Dt:	10/20/2000
Title:	PAD QUICK RELEASE DEVICE FOR CHEMICAL MECHANICAL PLANARIZATION

Patent #:	6346036	Issue Dt:	02/12/2002	Application #:	09693064	Filing Dt:	10/20/2000
Title:	Multi-pad apparatus for chemical mechanical planarization

Patent #:	6602121	Issue Dt:	08/05/2003	Application #:	09693148	Filing Dt:	10/20/2000
Title:	PAD SUPPORT APPARATUS FOR CHEMICAL MECHANICAL PLANARIZATION

Patent #:	6527621	Issue Dt:	03/04/2003	Application #:	09693152	Filing Dt:	10/20/2000
Title:	PAD RETRIEVAL APPARATUS FOR CHEMICAL MECHANICAL PLANARIZATION

Patent #:	6450860	Issue Dt:	09/17/2002	Application #:	09693153	Filing Dt:	10/20/2000
Title:	PAD TRANSFER APPARATUS FOR CHEMICAL MECHANICAL PLANARIZATION

Patent #:	6514121	Issue Dt:	02/04/2003	Application #:	09699202	Filing Dt:	10/26/2000
Title:	POLISHING CHEMICAL DELIVERY FOR SMALL HEAD CHEMICAL MECHANICAL PLANARIZATION

Patent #:	6520843	Issue Dt:	02/18/2003	Application #:	09699283	Filing Dt:	10/26/2000
Title:	HIGH PLANARITY CHEMICAL MECHANICAL PLANARIZATION

Patent #:	6514129	Issue Dt:	02/04/2003	Application #:	09699285	Filing Dt:	10/26/2000
Title:	MULTI-ACTION CHEMICAL MECHANICAL PLANARIZATION DEVICE AND METHOD

Patent #:	6511368	Issue Dt:	01/28/2003	Application #:	09699287	Filing Dt:	10/26/2000
Title:	SPHERICAL DRIVE ASSEMBLY FOR CHEMICAL MECHANICAL PLANARIZATION

Patent #:	6379235	Issue Dt:	04/30/2002	Application #:	09699289	Filing Dt:	10/26/2000
Title:	WAFER SUPPORT FOR CHEMICAL MECHANICAL PLANARIZATION

Patent #:	6629874	Issue Dt:	10/07/2003	Application #:	09699290	Filing Dt:	10/26/2000
Title:	IN SITU FEATURE HEIGHT MEASUREMENT DURING CMP

Patent #:	6551179	Issue Dt:	04/22/2003	Application #:	09706336	Filing Dt:	11/03/2000
Title:	HARD POLISHING PAD FOR CHEMICAL MECHANICAL PLANARIZATION

Patent #:	6692339	Issue Dt:	02/17/2004	Application #:	09706349	Filing Dt:	11/03/2000
Title:	COMBINED CHEMICAL MECHANICAL PLANARIZATION AND CLEANING

Patent #:	6547651	Issue Dt:	04/15/2003	Application #:	09709972	Filing Dt:	11/10/2000
Title:	SUBAPERATURE CHEMICAL MECHANICAL PLANARIZATION WITH POLISHING PAD CONDITIONING

Patent #:	6595829	Issue Dt:	07/22/2003	Application #:	09777501	Filing Dt:	02/05/2001
Title:	SLURRY PUMP CONTROL SYSTEM

Patent #:	6739945	Issue Dt:	05/25/2004	Application #:	09970252	Filing Dt:	09/29/2001
Publication #:	US20020090887	Pub Dt:	07/11/2002
Title:	POLISHING PAD WITH BUILT-IN OPTICAL SENSOR

Patent #:	6743722	Issue Dt:	06/01/2004	Application #:	10059701	Filing Dt:	01/29/2002
Publication #:	US20030143861	Pub Dt:	07/31/2003
Title:	METHOD OF SPIN ETCHING WAFERS WITH AN ALKALI SOLUTION

Patent #:	6921719	Issue Dt:	07/26/2005	Application #:	10065589	Filing Dt:	10/31/2002
Publication #:	US20040087146	Pub Dt:	05/06/2004
Title:	METHOD OF PREPARING WHOLE SEMICONDUCTOR WAFER FOR ANALYSIS

Patent #:	6696005	Issue Dt:	02/24/2004	Application #:	10145332	Filing Dt:	05/13/2002
Publication #:	US20030209830	Pub Dt:	11/13/2003
Title:	METHOD FOR MAKING A POLISHING PAD WITH BUILT-IN OPTICAL SENSOR

Patent #:	6696005	Issue Dt:	02/24/2004	Application #:	10145332	Filing Dt:	05/13/2002
Publication #:	US20030209830	Pub Dt:	11/13/2003
Title:	METHOD FOR MAKING A POLISHING PAD WITH BUILT-IN OPTICAL SENSOR

Patent #:	6726528	Issue Dt:	04/27/2004	Application #:	10146494	Filing Dt:	05/14/2002
Publication #:	US20030216107	Pub Dt:	11/20/2003
Title:	POLISHING PAD WITH OPTICAL SENSOR

Patent #:	6884150	Issue Dt:	04/26/2005	Application #:	10216107	Filing Dt:	08/08/2002
Publication #:	US20030216108	Pub Dt:	11/20/2003
Title:	POLISHING PAD SENSOR ASSEMBLY WITH A DAMPING PAD

Patent #:	7018268	Issue Dt:	03/28/2006	Application #:	10249433	Filing Dt:	04/08/2003
Publication #:	US20030211813	Pub Dt:	11/13/2003
Title:	PROTECTION OF WORK PIECE DURING SURFACE PROCESSING

Patent #:	6638389	Issue Dt:	10/28/2003	Application #:	10259536	Filing Dt:	09/26/2002
Publication #:	US20030079828	Pub Dt:	05/01/2003
Title:	METHOD FOR APPLYING AN INSERT OR TAPE TO CHUCKS OR WAFER CARRIERS USED FOR GRINDING, POLISHING, OR PLANARIZING WAFERS

Patent #:	6638389	Issue Dt:	10/28/2003	Application #:	10259536	Filing Dt:	09/26/2002
Publication #:	US20030079828	Pub Dt:	05/01/2003
Title:	METHOD FOR APPLYING AN INSERT OR TAPE TO CHUCKS OR WAFER CARRIERS USED FOR GRINDING, POLISHING, OR PLANARIZING WAFERS

Patent #:	6695681	Issue Dt:	02/24/2004	Application #:	10303621	Filing Dt:	11/25/2002
Publication #:	US20030109196	Pub Dt:	06/12/2003
Title:	ENDPOINT DETECTION SYSTEM FOR WAFER POLISHING

Patent #:	6866564	Issue Dt:	03/15/2005	Application #:	10315746	Filing Dt:	12/10/2002
Publication #:	US20030134578	Pub Dt:	07/17/2003
Title:	METHOD OF BACKGRINDING WAFERS WHILE LEAVING BACKGRINDING TAPE ON A CHUCK

Patent #:	6866564	Issue Dt:	03/15/2005	Application #:	10315746	Filing Dt:	12/10/2002
Publication #:	US20030134578	Pub Dt:	07/17/2003
Title:	METHOD OF BACKGRINDING WAFERS WHILE LEAVING BACKGRINDING TAPE ON A CHUCK

Patent #:	6855030	Issue Dt:	02/15/2005	Application #:	10327712	Filing Dt:	12/19/2002
Publication #:	US20040048550	Pub Dt:	03/11/2004
Title:	MODULAR METHOD FOR CHEMICAL MECHANICAL PLANARIZATION

Patent #:	6837133	Issue Dt:	01/04/2005	Application #:	10338413	Filing Dt:	01/08/2003
Publication #:	US20040128841	Pub Dt:	07/08/2004
Title:	PIVOTAL GUARD COVER FOR HAND-HELD KITCHEN PEELER

Patent #:	6885206	Issue Dt:	04/26/2005	Application #:	10365081	Filing Dt:	02/11/2003
Publication #:	US20040155671	Pub Dt:	08/12/2004
Title:	DEVICE FOR SUPPORTING THIN SEMICONDUCTOR WAFERS

Patent #:	6945856	Issue Dt:	09/20/2005	Application #:	10374494	Filing Dt:	02/25/2003
Publication #:	US20030153250	Pub Dt:	08/14/2003
Title:	SUBAPERTURE CHEMICAL MECHANICAL PLANARIZATION WITH POLISHING PAD CONDITIONING

Patent #:	7118446	Issue Dt:	10/10/2006	Application #:	10407833	Filing Dt:	04/04/2003
Publication #:	US20040198196	Pub Dt:	10/07/2004
Title:	GRINDING APPARATUS AND METHOD

Patent #:	7156946	Issue Dt:	01/02/2007	Application #:	10425896	Filing Dt:	04/28/2003
Publication #:	US20040226656	Pub Dt:	11/18/2004
Title:	WAFER CARRIER PIVOT MECHANISM

Patent #:	7008309	Issue Dt:	03/07/2006	Application #:	10452411	Filing Dt:	05/30/2003
Publication #:	US20040242135	Pub Dt:	12/02/2004
Title:	BACK PRESSURE CONTROL SYSTEM FOR CMP AND WAFER POLISHING

Patent #:	7008309	Issue Dt:	03/07/2006	Application #:	10452411	Filing Dt:	05/30/2003
Publication #:	US20040242135	Pub Dt:	12/02/2004
Title:	BACK PRESSURE CONTROL SYSTEM FOR CMP AND WAFER POLISHING

Patent #:	6878037	Issue Dt:	04/12/2005	Application #:	10626490	Filing Dt:	07/22/2003
Publication #:	US20040142636	Pub Dt:	07/22/2004
Title:	SLURRY PUMP CONTROL SYSTEM

Patent #:	6869348	Issue Dt:	03/22/2005	Application #:	10680995	Filing Dt:	10/07/2003
Publication #:	US20050075062	Pub Dt:	04/07/2005
Title:	RETAINING RING FOR WAFER CARRIERS

Patent #:	6976901	Issue Dt:	12/20/2005	Application #:	10681047	Filing Dt:	10/07/2003
Title:	IN SITU FEATURE HEIGHT MEASUREMENT

Patent #:	7059942	Issue Dt:	06/13/2006	Application #:	10717032	Filing Dt:	11/18/2003
Publication #:	US20040157536	Pub Dt:	08/12/2004
Title:	METHOD OF BACKGRINDING WAFERS WHILE LEAVING BACKGRINDING TAPE ON A CHUCK

Patent #:	7059942	Issue Dt:	06/13/2006	Application #:	10717032	Filing Dt:	11/18/2003
Publication #:	US20040157536	Pub Dt:	08/12/2004
Title:	METHOD OF BACKGRINDING WAFERS WHILE LEAVING BACKGRINDING TAPE ON A CHUCK

Patent #:	7235154	Issue Dt:	06/26/2007	Application #:	10754360	Filing Dt:	01/08/2004
Publication #:	US20050150599	Pub Dt:	07/14/2005
Title:	DEVICES AND METHODS FOR OPTICAL ENDPOINT DETECTION DURING SEMICONDUCTOR WAFER POLISHING

Patent #:	7052366	Issue Dt:	05/30/2006	Application #:	10785393	Filing Dt:	02/23/2004
Publication #:	US20040229545	Pub Dt:	11/18/2004
Title:	ENDPOINT DETECTION SYSTEM FOR WAFER POLISHING

Patent #:	6986701	Issue Dt:	01/17/2006	Application #:	10850346	Filing Dt:	05/20/2004
Publication #:	US20050009449	Pub Dt:	01/13/2005
Title:	POLISHING PAD WITH BUILT-IN OPTICAL SENSOR

Patent #:	7160808	Issue Dt:	01/09/2007	Application #:	10860381	Filing Dt:	06/01/2004
Publication #:	US20050009349	Pub Dt:	01/13/2005
Title:	CHUCK FOR SUPPORTING WAFERS WITH A FLUID

Patent #:	7040955	Issue Dt:	05/09/2006	Application #:	11046502	Filing Dt:	01/28/2005
Title:	CHEMICAL-MECHANICAL PLANARIZATION TOOL FORCE CALIBRATION METHOD AND SYSTEM

Patent #:	7033252	Issue Dt:	04/25/2006	Application #:	11055550	Filing Dt:	02/10/2005
Publication #:	US20050215182	Pub Dt:	09/29/2005
Title:	WAFER CARRIER WITH PRESSURIZED MEMBRANE AND RETAINING RING ACTUATOR

Patent #:	7063604	Issue Dt:	06/20/2006	Application #:	11072636	Filing Dt:	03/04/2005
Publication #:	US20050202765	Pub Dt:	09/15/2005
Title:	INDEPENDENT EDGE CONTROL FOR CMP CARRIERS

Patent #:	7063605	Issue Dt:	06/20/2006	Application #:	11084475	Filing Dt:	03/18/2005
Publication #:	US20050164617	Pub Dt:	07/28/2005
Title:	RETAINING RING FOR WAFER CARRIERS

Patent #:	7249992	Issue Dt:	07/31/2007	Application #:	11173992	Filing Dt:	07/01/2005
Publication #:	US20060035563	Pub Dt:	02/16/2006
Title:	METHOD, APPARATUS AND SYSTEM FOR USE IN PROCESSING WAFERS

Patent #:	7083497	Issue Dt:	08/01/2006	Application #:	11334148	Filing Dt:	01/17/2006
Publication #:	US20060116051	Pub Dt:	06/01/2006
Title:	POLISHING PAD WITH BUILT-IN OPTICAL SENSOR

Patent #:	7467990	Issue Dt:	12/23/2008	Application #:	11369700	Filing Dt:	03/06/2006
Publication #:	US20060166611	Pub Dt:	07/27/2006
Title:	BACK PRESSURE CONTROL SYSTEM FOR CMP AND WAFER POLISHING

Patent #:	7467990	Issue Dt:	12/23/2008	Application #:	11369700	Filing Dt:	03/06/2006
Publication #:	US20060166611	Pub Dt:	07/27/2006
Title:	BACK PRESSURE CONTROL SYSTEM FOR CMP AND WAFER POLISHING

Patent #:	NONE	Issue Dt:		Application #:	11393041	Filing Dt:	03/29/2006
Publication #:	US20070235133	Pub Dt:	10/11/2007
Title:	Devices and methods for measuring wafer characteristics during semiconductor wafer polishing

Patent #:	7131892	Issue Dt:	11/07/2006	Application #:	11410440	Filing Dt:	04/24/2006
Publication #:	US20060194519	Pub Dt:	08/31/2006
Title:	WAFER CARRIER WITH PRESSURIZED MEMBRANE AND RETAINING RING ACTUATOR

Patent #:	7195541	Issue Dt:	03/27/2007	Application #:	11443788	Filing Dt:	05/30/2006
Publication #:	US20060217038	Pub Dt:	09/28/2006
Title:	ENDPOINT DETECTION SYSTEM FOR WAFER POLISHING

Patent #:	7458878	Issue Dt:	12/02/2008	Application #:	11548213	Filing Dt:	10/10/2006
Publication #:	US20070128983	Pub Dt:	06/07/2007
Title:	GRINDING APPARATUS AND METHOD

Patent #:	7238083	Issue Dt:	07/03/2007	Application #:	11594267	Filing Dt:	11/07/2006
Publication #:	US20070054603	Pub Dt:	03/08/2007
Title:	WAFER CARRIER WITH PRESSURIZED MEMBRANE AND RETAINING RING ACTUATOR

Patent #:	7551979	Issue Dt:	06/23/2009	Application #:	11600978	Filing Dt:	11/17/2006
Publication #:	US20070150100	Pub Dt:	06/28/2007
Title:	ROBOT CALIBRATION SYSTEM AND METHOD

Patent #:	7549909	Issue Dt:	06/23/2009	Application #:	11768873	Filing Dt:	06/26/2007
Publication #:	US20080032602	Pub Dt:	02/07/2008
Title:	METHODS FOR OPTICAL ENDPOINT DETECTION DURING SEMICONDUCTOR WAFER POLISHING

Patent #:	8052504	Issue Dt:	11/08/2011	Application #:	11829798	Filing Dt:	07/27/2007
Publication #:	US20070269986	Pub Dt:	11/22/2007
Title:	METHOD, APPARATUS AND SYSTEM FOR USE IN PROCESSING WAFERS

Patent #:	7959496	Issue Dt:	06/14/2011	Application #:	11969175	Filing Dt:	01/03/2008
Publication #:	US20090176445	Pub Dt:	07/09/2009
Title:	FLEXIBLE MEMBRANE ASSEMBLY FOR A CMP SYSTEM AND METHOD OF USING

Patent #:	8182312	Issue Dt:	05/22/2012	Application #:	12205861	Filing Dt:	09/06/2008
Publication #:	US20100062685	Pub Dt:	03/11/2010
Title:	CMP SYSTEM WITH WIRELESS ENDPOINT DETECTION SYSTEM

Patent #:	8133093	Issue Dt:	03/13/2012	Application #:	12287550	Filing Dt:	10/10/2008
Publication #:	US20100093264	Pub Dt:	04/15/2010
Title:	GRINDING APPARATUS HAVING AN EXTENDABLE WHEEL MOUNT

Patent #:	7918712	Issue Dt:	04/05/2011	Application #:	12705091	Filing Dt:	02/12/2010
Publication #:	US20100144244	Pub Dt:	06/10/2010
Title:	ENDPOINT DETECTION SYSTEM FOR WAFER POLISHING

Patent #:	NONE	Issue Dt:		Application #:	12806518	Filing Dt:	08/16/2010
Publication #:	US20120040591	Pub Dt:	02/16/2012
Title:	Replaceable cover for membrane carrier

Patent #:	NONE	Issue Dt:		Application #:	13243808	Filing Dt:	09/23/2011
Publication #:	US20130078812	Pub Dt:	03/28/2013
Title:	Wafer Carrier with Flexible Pressure Plate

Patent #:	8740673	Issue Dt:	06/03/2014	Application #:	13252897	Filing Dt:	10/04/2011
Publication #:	US20120088366	Pub Dt:	04/12/2012
Title:	CMP RETAINING RING WITH SOFT RETAINING RING INSERT

Patent #:	8520222	Issue Dt:	08/27/2013	Application #:	13291800	Filing Dt:	11/08/2011
Publication #:	US20130114090	Pub Dt:	05/09/2013
Title:	SYSTEM AND METHOD FOR IN SITU MONITORING OF TOP WAFER THICKNESS IN A STACK OF WAFERS

Patent #:	NONE	Issue Dt:		Application #:	13573148	Filing Dt:	08/27/2012
Publication #:	US20140057531	Pub Dt:	02/27/2014
Title:	Method for grinding wafers by shaping resilient chuck covering

Patent #:	8968052	Issue Dt:	03/03/2015	Application #:	13656514	Filing Dt:	10/19/2012
Publication #:	US20130102227	Pub Dt:	04/25/2013
Title:	SYSTEMS AND METHODS OF WAFER GRINDING

Patent #:	8968052	Issue Dt:	03/03/2015	Application #:	13656514	Filing Dt:	10/19/2012
Publication #:	US20130102227	Pub Dt:	04/25/2013
Title:	SYSTEMS AND METHODS OF WAFER GRINDING

Patent #:	8915771	Issue Dt:	12/23/2014	Application #:	13694723	Filing Dt:	12/27/2012
Publication #:	US20140187128	Pub Dt:	07/03/2014
Title:	Method and apparatus for cleaning grinding work chuck using a vacuum

Patent #:	9393669	Issue Dt:	07/19/2016	Application #:	13740101	Filing Dt:	01/11/2013
Publication #:	US20130130593	Pub Dt:	05/23/2013
Title:	SYSTEMS AND METHODS OF PROCESSING SUBSTRATES

Patent #:	9457446	Issue Dt:	10/04/2016	Application #:	14042591	Filing Dt:	09/30/2013
Publication #:	US20140134923	Pub Dt:	05/15/2014
Title:	METHODS AND SYSTEMS FOR USE IN GRIND SHAPE CONTROL ADAPTATION

Patent #:	9610669	Issue Dt:	04/04/2017	Application #:	14042600	Filing Dt:	09/30/2013
Publication #:	US20140134927	Pub Dt:	05/15/2014
Title:	METHODS AND SYSTEMS FOR USE IN GRIND SPINDLE ALIGNMENT

Patent #:	9193030	Issue Dt:	11/24/2015	Application #:	14295013	Filing Dt:	06/03/2014
Publication #:	US20140287657	Pub Dt:	09/25/2014
Title:	CMP RETAINING RING WITH SOFT RETAINING RING INSERT

Patent #:	9082713	Issue Dt:	07/14/2015	Application #:	14525115	Filing Dt:	10/27/2014
Publication #:	US20150118826	Pub Dt:	04/30/2015
Title:	METHOD OF GRINDING WAFER STACKS TO PROVIDE UNIFORM RESIDUAL SILICON THICKNESS

Patent #:	9082713	Issue Dt:	07/14/2015	Application #:	14525115	Filing Dt:	10/27/2014
Publication #:	US20150118826	Pub Dt:	04/30/2015
Title:	METHOD OF GRINDING WAFER STACKS TO PROVIDE UNIFORM RESIDUAL SILICON THICKNESS

Assignor

STRASBAUGH AND R.H. STRASBAUGH

Exec Dt:

11/13/2015

Assignee

BFI BUSINESS FINANCE DBA CAPITALSOURCE BUSINESS FINANCE GROUP

851 E. HAMILTON AVENUE

#200

CAMPBELL, CALIFORNIA 95008

Correspondence name and address
	IRVING KESCHNER
	21515 HAWTHORNE BOULEVARD
	SUITE 1010
	TORRANCE, CA 90503

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