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Reel/Frame:	042375/0769			Pages:	9
		Recorded:	05/15/2017
Attorney Dkt #:	F170128 PT TERM
Conveyance:	SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 32

Patent #:	9337054	Issue Dt:	05/10/2016	Application #:	12665929	Filing Dt:	02/05/2010
Publication #:	US20100164057	Pub Dt:	07/01/2010
Title:	PRECURSORS FOR SILICON DIOXIDE GAP FILL

Patent #:	9297374	Issue Dt:	03/29/2016	Application #:	13277684	Filing Dt:	10/20/2011
Publication #:	US20120128505	Pub Dt:	05/24/2012
Title:	Method and System for Pump Priming

Patent #:	9340878	Issue Dt:	05/17/2016	Application #:	13375053	Filing Dt:	01/21/2012
Publication #:	US20120114836	Pub Dt:	05/10/2012
Title:	TPIR APPARATUS FOR MONITORING TUNGSTEN HEXAFLUORIDE PROCESSING TO DETECT GAS PHASE NUCLEATION, AND METHOD AND SYSTEM UTILIZING SAME

Patent #:	9383064	Issue Dt:	07/05/2016	Application #:	13522000	Filing Dt:	07/31/2012
Publication #:	US20120315837	Pub Dt:	12/13/2012
Title:	VENTILATION GAS MANAGEMENT SYSTEMS AND PROCESSES

Patent #:	9472431	Issue Dt:	10/18/2016	Application #:	13583886	Filing Dt:	11/16/2012
Publication #:	US20130056389	Pub Dt:	03/07/2013
Title:	THIN WAFER SHIPPER

Patent #:	9455147	Issue Dt:	09/27/2016	Application #:	13726826	Filing Dt:	12/26/2012
Publication #:	US20130137250	Pub Dt:	05/30/2013
Title:	BORON ION IMPLANTATION USING ALTERNATIVE FLUORINATED BORON PRECURSORS, AND FORMATION OF LARGE BORON HYDRIDES FOR IMPLANTATION

Patent #:	9373677	Issue Dt:	06/21/2016	Application #:	13808165	Filing Dt:	01/28/2013
Publication #:	US20130122722	Pub Dt:	05/16/2013
Title:	DOPING OF ZrO2 FOR DRAM APPLICATIONS

Patent #:	9385310	Issue Dt:	07/05/2016	Application #:	13872087	Filing Dt:	04/27/2013
Publication #:	US20130284999	Pub Dt:	10/31/2013
Title:	PHASE CHANGE MEMORY STRUCTURE COMPRISING PHASE CHANGE ALLOY CENTER-FILLED WITH DIELECTRIC MATERIAL

Patent #:	9269582	Issue Dt:	02/23/2016	Application #:	14006662	Filing Dt:	09/21/2013
Publication #:	US20140011346	Pub Dt:	01/09/2014
Title:	CLUSTER ION IMPLANTATION OF ARSENIC AND PHOSPHORUS

Patent #:	9399989	Issue Dt:	07/26/2016	Application #:	14019163	Filing Dt:	09/05/2013
Publication #:	US20140044570	Pub Dt:	02/13/2014
Title:	SYSTEM AND METHOD FOR A PUMP WITH ONBOARD ELECTRONICS

Patent #:	9347616	Issue Dt:	05/24/2016	Application #:	14119402	Filing Dt:	11/21/2013
Publication #:	US20140083512	Pub Dt:	03/27/2014
Title:	REFILLABLE AMPOULE WITH PURGE CAPABILITY

Patent #:	9309872	Issue Dt:	04/12/2016	Application #:	14152866	Filing Dt:	01/10/2014
Publication #:	US20140127034	Pub Dt:	05/08/2014
Title:	SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP

Patent #:	9354637	Issue Dt:	05/31/2016	Application #:	14175573	Filing Dt:	02/07/2014
Publication #:	US20140222222	Pub Dt:	08/07/2014
Title:	METHOD AND SYSTEM FOR CONTROLLING OPERATION OF A PUMP BASED ON FILTER INFORMATION IN A FILTER INFORMATION TAG

Patent #:	9234628	Issue Dt:	01/12/2016	Application #:	14224536	Filing Dt:	03/25/2014
Publication #:	US20140202547	Pub Dt:	07/24/2014
Title:	PVDF PYROLYZATE ADSORBENT AND GAS STORAGE AND DISPENSING SYSTEM UTILIZING SAME

Patent #:	9443736	Issue Dt:	09/13/2016	Application #:	14400793	Filing Dt:	11/12/2014
Publication #:	US20150147824	Pub Dt:	05/28/2015
Title:	SILYLENE COMPOSITIONS AND METHODS OF USE THEREOF

Patent #:	9518933	Issue Dt:	12/13/2016	Application #:	14433363	Filing Dt:	04/02/2015
Publication #:	US20150276619	Pub Dt:	10/01/2015
Title:	OPTO-ELECTRONIC INSPECTION QUALITY ASSURANCE SYSTEM FOR FLUID DISPENSING VALVES

Patent #:	9518971	Issue Dt:	12/13/2016	Application #:	14506617	Filing Dt:	10/04/2014
Publication #:	US20150027202	Pub Dt:	01/29/2015
Title:	RECOVERY OF XE AND OTHER HIGH VALUE COMPOUNDS

Patent #:	9518701	Issue Dt:	12/13/2016	Application #:	14513933	Filing Dt:	10/14/2014
Publication #:	US20150027909	Pub Dt:	01/29/2015
Title:	GAS STORAGE AND DISPENSING SYSTEM WITH MONOLITHIC CARBON ADSORBENT

Patent #:	9505603	Issue Dt:	11/29/2016	Application #:	14648084	Filing Dt:	05/28/2015
Publication #:	US20150298960	Pub Dt:	10/22/2015
Title:	SINGLE USE DISPENSE HEAD WITH KEY CODE

Patent #:	9262361	Issue Dt:	02/16/2016	Application #:	14663721	Filing Dt:	03/20/2015
Publication #:	US20150193370	Pub Dt:	07/09/2015
Title:	I/O Systems, Methods and Devices for Interfacing A Pump Controller

Patent #:	9469898	Issue Dt:	10/18/2016	Application #:	14815805	Filing Dt:	07/31/2015
Publication #:	US20150337436	Pub Dt:	11/26/2015
Title:	METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL

Patent #:	9283512	Issue Dt:	03/15/2016	Application #:	14833225	Filing Dt:	08/24/2015
Publication #:	US20150360164	Pub Dt:	12/17/2015
Title:	ADSORBENT HAVING UTILITY FOR CO2 CAPTURE FROM GAS MIXTURES

Patent #:	9370744	Issue Dt:	06/21/2016	Application #:	14881829	Filing Dt:	10/13/2015
Publication #:	US20160030879	Pub Dt:	02/04/2016
Title:	CARBON PYROLYZATE ADSORBENT HAVING UTILITY FOR CO2 CAPTURE AND METHODS OF MAKING AND USING THE SAME

Patent #:	9468901	Issue Dt:	10/18/2016	Application #:	14961793	Filing Dt:	12/07/2015
Publication #:	US20160089655	Pub Dt:	03/31/2016
Title:	PVDF PYROLYZATE ADSORBENT AND GAS STORAGE AND DISPENSING SYSTEM UTILIZING SAME

Patent #:	NONE	Issue Dt:		Application #:	15093865	Filing Dt:	04/08/2016
Publication #:	US20160225615	Pub Dt:	08/04/2016
Title:	PRECURSORS FOR SILICON DIOXIDE GAP FILL

Patent #:	10551004	Issue Dt:	02/04/2020	Application #:	15134548	Filing Dt:	04/21/2016
Publication #:	US20160230933	Pub Dt:	08/11/2016
Title:	REFILLABLE AMPOULE WITH PURGE CAPABILITY

Patent #:	NONE	Issue Dt:		Application #:	15156421	Filing Dt:	05/17/2016
Publication #:	US20160281238	Pub Dt:	09/29/2016
Title:	TPIR APPARATUS FOR MONITORING TUNGSTEN HEXAFLUORIDE PROCESSING TO DETECT GAS PHASE NUCLEATION, AND METHOD AND SYSTEM UTILIZING SAME

Patent #:	NONE	Issue Dt:		Application #:	15161217	Filing Dt:	05/21/2016
Publication #:	US20160343795	Pub Dt:	11/24/2016
Title:	DOPING OF ZrO2 FOR DRAM APPLICATIONS

Patent #:	NONE	Issue Dt:		Application #:	15202521	Filing Dt:	07/05/2016
Publication #:	US20160305682	Pub Dt:	10/20/2016
Title:	VENTILATION GAS MANAGEMENT SYSTEMS AND PROCESSES

Patent #:	10276414	Issue Dt:	04/30/2019	Application #:	15269368	Filing Dt:	09/19/2016
Publication #:	US20170062253	Pub Dt:	03/02/2017
Title:	THIN WAFER SHIPPER

Patent #:	10395963	Issue Dt:	08/27/2019	Application #:	15294950	Filing Dt:	10/17/2016
Publication #:	US20170098568	Pub Dt:	04/06/2017
Title:	Electrostatic Chuck

Patent #:	10497569	Issue Dt:	12/03/2019	Application #:	15354076	Filing Dt:	11/17/2016
Publication #:	US20170069499	Pub Dt:	03/09/2017
Title:	CARBON MATERIALS FOR CARBON IMPLANTATION

Assignors

ENTEGRIS, INC.

Exec Dt:

04/08/2016

POCO GRAPHITE, INC.

Exec Dt:

05/12/2017

Assignee

GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT

200 WEST STREET

NEW YORK, NEW YORK 10282

Correspondence name and address
	JOANNA MCCALL
	1025 VERMONT AVE NW, SUITE 1130
	COGENCY GLOBAL INC.
	WASHINGTON, DC 20005

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