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Reel/Frame:042410/0875   Pages: 4
Recorded: 05/17/2017
Attorney Dkt #:MAPS-57583
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
10/02/2018
Application #:
15527360
Filing Dt:
05/17/2017
Publication #:
Pub Dt:
11/09/2017
Title:
SELECTIVE PLASMA ETCHING METHOD OF A FIRST REGION CONTAINING A SILICON ATOM AND AN OXYGEN ATOM
Assignors
1
Exec Dt:
05/09/2017
2
Exec Dt:
04/27/2017
3
Exec Dt:
04/27/2017
Assignee
1
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
PEARNE & GORDON LLP
1801 EAST 9TH STREET
SUITE 1200
CLEVELAND, OH 44114-3108

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